Hirofumi TAKEGUCHI

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,769,661
- Issue date Sep 26, 2023
- Tokyo Electron Limited
- Hirofumi Takeguchi
- B08 - CLEANING
Information Patent Grant
Developing method, developing apparatus, and computer-readable reco...
- Patent number 10,901,320
- Issue date Jan 26, 2021
- Tokyo Electron Limited
- Tomohiro Iseki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Developing method, developing apparatus, and computer-readable reco...
- Patent number 10,120,286
- Issue date Nov 6, 2018
- Tokyo Electron Limited
- Tomohiro Iseki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Solution treatment apparatus and solution treatment method
- Patent number 10,022,652
- Issue date Jul 17, 2018
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method, developing apparatus, and computer-readable stor...
- Patent number 9,952,512
- Issue date Apr 24, 2018
- Tokyo Electron Limited
- Hirofumi Takeguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Solution treatment apparatus and solution treatment method
- Patent number 9,878,267
- Issue date Jan 30, 2018
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Solution treatment apparatus and solution treatment method
- Patent number 9,731,226
- Issue date Aug 15, 2017
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method, developing apparatus and storage medium
- Patent number 9,690,202
- Issue date Jun 27, 2017
- Tokyo Electron Limited
- Yuichi Terashita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method for developing apparatus
- Patent number 9,256,131
- Issue date Feb 9, 2016
- Tokyo Electron Limited
- Hirofumi Takeguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing apparatus, developing method and storage medium
- Patent number 8,956,694
- Issue date Feb 17, 2015
- Tokyo Electron Limited
- Hirofumi Takeguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method and developing apparatus
- Patent number 8,865,396
- Issue date Oct 21, 2014
- Tokyo Electron Limited
- Hirofumi Takeguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment method, computer storage medium and substrate t...
- Patent number 8,469,614
- Issue date Jun 25, 2013
- Tokyo Electron Limited
- Hirofumi Takeguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing device and developing method
- Patent number 8,445,189
- Issue date May 21, 2013
- Tokyo Electron Limited
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing device, developing method and storage medium
- Patent number 8,440,266
- Issue date May 14, 2013
- Tokyo Electron Limited
- Norikatsu Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Rinsing method, developing method, developing system and computer-r...
- Patent number 8,147,153
- Issue date Apr 3, 2012
- Tokyo Electron Limited
- Hirofumi Takeguchi
- B08 - CLEANING
Information Patent Grant
Rinse method and developing apparatus
- Patent number 8,029,624
- Issue date Oct 4, 2011
- Tokyo Electron Limited
- Kousuke Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing apparatus and developing method
- Patent number 8,026,048
- Issue date Sep 27, 2011
- Tokyo Electron Limited
- Atsushi Ookouchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Developing device and developing method
- Patent number 7,918,182
- Issue date Apr 5, 2011
- Tokyo Electronic Limited
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate cleaning method and developing apparatus
- Patent number 7,901,514
- Issue date Mar 8, 2011
- Tokyo Electron Limited
- Junji Nakamura
- B08 - CLEANING
Information Patent Grant
Developing method, developing apparatus and storage medium
- Patent number 7,896,562
- Issue date Mar 1, 2011
- Tokyo Electron Limited
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Rinsing method, developing method, developing system and computer-r...
- Patent number 7,841,787
- Issue date Nov 30, 2010
- Tokyo Electron Limited
- Hirofumi Takeguchi
- B08 - CLEANING
Information Patent Grant
Development device and development method
- Patent number 7,823,534
- Issue date Nov 2, 2010
- Tokyo Electron Limited
- Atsushi Ookouchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Developing apparatus and method
- Patent number 7,806,076
- Issue date Oct 5, 2010
- Tokyo Electron Limited
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing apparatus, developing method and storage medium
- Patent number 7,665,918
- Issue date Feb 23, 2010
- Tokyo Electron Limited
- Taro Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method and developing apparatus
- Patent number 7,604,013
- Issue date Oct 20, 2009
- Tokyo Electron Limited
- Junji Nakamura
- B08 - CLEANING
Information Patent Grant
Method for developing processing and apparatus for supplying develo...
- Patent number 6,991,385
- Issue date Jan 31, 2006
- Tokyo Electron Limited
- Kousuke Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for developing processing and apparatus for supplying develo...
- Patent number 6,811,962
- Issue date Nov 2, 2004
- Tokyo Electron Limited
- Kousuke Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for development
- Patent number 6,709,174
- Issue date Mar 23, 2004
- Tokyo Electron Limited
- Taro Yamamoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUPPLY SYSTEM, SUBSTRATE PROCESSING...
- Publication number 20240047234
- Publication date Feb 8, 2024
- TOKYO ELECTRON LIMITED
- Yosuke HACHIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220399208
- Publication date Dec 15, 2022
- TOKYO ELECTRON LIMITED
- Hirofumi TAKEGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200381245
- Publication date Dec 3, 2020
- TOKYO ELECTRON LIMITED
- Hirofumi Takeguchi
- B08 - CLEANING
Information Patent Application
Developing Method, Developing Apparatus, and Computer-Readable Reco...
- Publication number 20190056666
- Publication date Feb 21, 2019
- TOKYO ELECTRON LIMITED
- Tomohiro ISEKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20180185856
- Publication date Jul 5, 2018
- TOKYO ELECTRON LIMITED
- Hirofumi TAKEGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD
- Publication number 20180093205
- Publication date Apr 5, 2018
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD
- Publication number 20170296944
- Publication date Oct 19, 2017
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM
- Publication number 20160070171
- Publication date Mar 10, 2016
- TOKYO ELECTRON LIMITED
- Yuichi TERASHITA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developing Method, Developing Apparatus, and Computer-Readable Reco...
- Publication number 20160026087
- Publication date Jan 28, 2016
- TOKYO ELECTRON LIMITED
- Tomohiro ISEKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS, AND COMPUTER-READABLE STOR...
- Publication number 20150362839
- Publication date Dec 17, 2015
- TOKYO ELECTRON LIMITED
- Hirofumi TAKEGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD
- Publication number 20150000517
- Publication date Jan 1, 2015
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
DEVELOPING METHOD FOR DEVELOPING APPARATUS
- Publication number 20140347639
- Publication date Nov 27, 2014
- Hirofumi TAKEGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
- Publication number 20120115090
- Publication date May 10, 2012
- Hirofumi TAKEGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING DEVICE AND DEVELOPING METHOD
- Publication number 20110127236
- Publication date Jun 2, 2011
- TOKYO ELECTRON LIMITED
- Taro YAMAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM
- Publication number 20110096304
- Publication date Apr 28, 2011
- TOKYO ELECTRON LIMITED
- Hirofumi TAKEGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RINSING METHOD, DEVELOPING METHOD, DEVELOPING SYSTEM AND COMPUTER-R...
- Publication number 20110045414
- Publication date Feb 24, 2011
- TOKYO ELECTRON LIMITED
- Hirofumi TAKEGUCHI
- B08 - CLEANING
Information Patent Application
DEVELOPING APPARATUS AND DEVELOPING METHOD
- Publication number 20100330508
- Publication date Dec 30, 2010
- TOKYO ELECTRON LIMITED
- Atsushi OOKOUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING APPARATUS AND METHOD
- Publication number 20100323307
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING DEVICE, DEVELOPING METHOD AND STORAGE MEDIUM
- Publication number 20100203250
- Publication date Aug 12, 2010
- TOKYO ELECTRON LIMITED
- Norikatsu Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING METHOD AND DEVELOPING APPARATUS
- Publication number 20090311632
- Publication date Dec 17, 2009
- TOKYO ELECTRON LIMITED
- Hirofumi TAKEGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CLEANING METHOD AND DEVELOPING APPARATUS
- Publication number 20090272407
- Publication date Nov 5, 2009
- TOKYO ELECTRON LIMITED
- Junji Nakamura
- B08 - CLEANING
Information Patent Application
Development device and development method
- Publication number 20090130614
- Publication date May 21, 2009
- TOKYO ELECTRON LIMITED
- Atsushi Ookouchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM
- Publication number 20090035021
- Publication date Feb 5, 2009
- TOKYO ELECTRON LIMITED
- Taro YAMAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM
- Publication number 20090033898
- Publication date Feb 5, 2009
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developing device and developing method
- Publication number 20070184178
- Publication date Aug 9, 2007
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Rinse method and developing apparatus
- Publication number 20070119479
- Publication date May 31, 2007
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RINSING METHOD, DEVELOPING METHOD, DEVELOPING SYSTEM AND COMPUTER-R...
- Publication number 20070116459
- Publication date May 24, 2007
- TOKYO ELECTRON LIMITED
- Hirofumi TAKEGUCHI
- B08 - CLEANING
Information Patent Application
Substrate cleaning method and developing apparatus
- Publication number 20060048792
- Publication date Mar 9, 2006
- TOKYO ELECTRON LIMITED
- Junji Nakamura
- B08 - CLEANING
Information Patent Application
Developing apparatus and method
- Publication number 20060040051
- Publication date Feb 23, 2006
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for developing processing and apparatus for supplying develo...
- Publication number 20050053874
- Publication date Mar 10, 2005
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hirofumi TAKEGUCHI

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Developing method, developing apparatus, and computer-readable reco...

Developing method, developing apparatus, and computer-readable reco...

Solution treatment apparatus and solution treatment method

Developing method, developing apparatus, and computer-readable stor...

Solution treatment apparatus and solution treatment method

Solution treatment apparatus and solution treatment method

Developing method, developing apparatus and storage medium

Developing method for developing apparatus

Developing apparatus, developing method and storage medium

Developing method and developing apparatus

Substrate treatment method, computer storage medium and substrate t...

Developing device and developing method

Developing device, developing method and storage medium

Rinsing method, developing method, developing system and computer-r...

Rinse method and developing apparatus

Developing apparatus and developing method

Developing device and developing method

Substrate cleaning method and developing apparatus

Developing method, developing apparatus and storage medium

Rinsing method, developing method, developing system and computer-r...

Development device and development method

Developing apparatus and method

Developing apparatus, developing method and storage medium

Substrate cleaning method and developing apparatus

Method for developing processing and apparatus for supplying develo...

Method for developing processing and apparatus for supplying develo...

Apparatus and method for development

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUPPLY SYSTEM, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Developing Method, Developing Apparatus, and Computer-Readable Reco...

LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD

SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD

SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD

DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM

Developing Method, Developing Apparatus, and Computer-Readable Reco...

DEVELOPING METHOD, DEVELOPING APPARATUS, AND COMPUTER-READABLE STOR...

SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD

DEVELOPING METHOD FOR DEVELOPING APPARATUS

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...

DEVELOPING DEVICE AND DEVELOPING METHOD

DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM

RINSING METHOD, DEVELOPING METHOD, DEVELOPING SYSTEM AND COMPUTER-R...

DEVELOPING APPARATUS AND DEVELOPING METHOD

DEVELOPING APPARATUS AND METHOD

DEVELOPING DEVICE, DEVELOPING METHOD AND STORAGE MEDIUM

DEVELOPING METHOD AND DEVELOPING APPARATUS

SUBSTRATE CLEANING METHOD AND DEVELOPING APPARATUS

Development device and development method

DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM

DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM

Developing device and developing method

Rinse method and developing apparatus

RINSING METHOD, DEVELOPING METHOD, DEVELOPING SYSTEM AND COMPUTER-R...

Substrate cleaning method and developing apparatus

Developing apparatus and method

Method for developing processing and apparatus for supplying develo...