Hirofumi Yamaguchi

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,856,655
- Issue date Dec 26, 2023
- Tokyo Electron Limited
- Hirofumi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing instructing device, processing instructing method, compu...
- Patent number 9,696,711
- Issue date Jul 4, 2017
- Tokyo Electron Limited
- Teruo Asakawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method for positioning a transfer unit, method for calculating posi...
- Patent number 9,541,920
- Issue date Jan 10, 2017
- Tokyo Electron Limited
- Masato Kubodera
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate transfer apparatus and substrate transfer method
- Patent number 8,545,160
- Issue date Oct 1, 2013
- Tokyo Electron Limited
- Hiromitsu Sakaue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system and method for operating the same
- Patent number 8,467,895
- Issue date Jun 18, 2013
- Tokyo Electron Limited
- Koichi Sekido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film position adjusting method, memory medium and substrate process...
- Patent number 8,318,238
- Issue date Nov 27, 2012
- Tokyo Electron Limited
- Yoshiaki Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum process apparaus
- Patent number 5,609,689
- Issue date Mar 11, 1997
- Tokyo Electron Limited
- Susumu Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200344850
- Publication date Oct 29, 2020
- TOKYO ELECTRON LIMITED
- Hirofumi YAMAGUCHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROCESSING INSTRUCTING DEVICE, PROCESSING INSTRUCTING METHOD, COMPU...
- Publication number 20140358271
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Teruo Asakawa
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
METHOD FOR POSITIONING A TRANSFER UNIT, METHOD FOR CALCULATING POSI...
- Publication number 20140107825
- Publication date Apr 17, 2014
- TOKYO ELECTRON LIMITED
- Masato KUBODERA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20110158774
- Publication date Jun 30, 2011
- TOKYO ELECTRON LIMITED
- Hirofumi YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20100226737
- Publication date Sep 9, 2010
- TOKYO ELECTRON LIMITED
- Hiromitsu Sakaue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS, PROCESSING METHOD, METHOD OF RECOGNIZING TARG...
- Publication number 20100080444
- Publication date Apr 1, 2010
- TOKYO ELECTRON LIMITED
- Hirofumi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS, METHOD OF OPERATING SAME AND STORAGE M...
- Publication number 20100022093
- Publication date Jan 28, 2010
- TOKYO ELECTRON LIMITED
- Hirofumi YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing System and Method for Operating the Same
- Publication number 20090226294
- Publication date Sep 10, 2009
- TOKYO ELECTRON LIMITED
- Koichi Sekido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM POSITION ADJUSTING METHOD, MEMORY MEDIUM AND SUBSTRATE PROCESS...
- Publication number 20090087542
- Publication date Apr 2, 2009
- TOKYO ELECTRON LIMITED
- Yoshiaki Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hirofumi Yamaguchi

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Processing instructing device, processing instructing method, compu...

Method for positioning a transfer unit, method for calculating posi...

Substrate transfer apparatus and substrate transfer method

Processing system and method for operating the same

Film position adjusting method, memory medium and substrate process...

Vacuum process apparaus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

PROCESSING INSTRUCTING DEVICE, PROCESSING INSTRUCTING METHOD, COMPU...

METHOD FOR POSITIONING A TRANSFER UNIT, METHOD FOR CALCULATING POSI...

SUBSTRATE PROCESSING APPARATUS AND METHOD

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD

PROCESSING APPARATUS, PROCESSING METHOD, METHOD OF RECOGNIZING TARG...

VACUUM PROCESSING APPARATUS, METHOD OF OPERATING SAME AND STORAGE M...

Processing System and Method for Operating the Same

FILM POSITION ADJUSTING METHOD, MEMORY MEDIUM AND SUBSTRATE PROCESS...