Hiroharu Hashiguchi

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method, substrate processing apparatus and sub...
- Patent number 7,060,115
- Issue date Jun 13, 2006
- Tokyo Electron Limited
- Hiroharu Hashiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method apparatus and substrate carrying method
- Patent number 6,461,986
- Issue date Oct 8, 2002
- Tokyo Electron Limited
- Hiroharu Hashiguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing method, substrate processing apparatus and sub...
- Publication number 20030003774
- Publication date Jan 2, 2003
- Hiroharu Hashiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method, substrate processing apparatus and sub...
- Publication number 20020009902
- Publication date Jan 24, 2002
- Hiroharu Hashiguchi
- H01 - BASIC ELECTRIC ELEMENTS