Hirohiko Murata

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Toyo-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Ion source apparatus and cleaning optimized method thereof
- Patent number 7,947,129
- Issue date May 24, 2011
- SEN Corporation, an SHI and Axcelis Company
- Hirohiko Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source apparatus and electronic energy optimized method therefor
- Patent number 7,012,263
- Issue date Mar 14, 2006
- Sumitomo Eaton Nova Corporation
- Hirohiko Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam mass separation filter, mass separation method thereof and...
- Patent number 6,803,590
- Issue date Oct 12, 2004
- Sumitomo Eaton Nova Corporation
- Adam Brailove
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Ion source apparatus and cleaning optimized method thereof
- Publication number 20050016838
- Publication date Jan 27, 2005
- Hirohiko Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion source apparatus and electronic energy optimized method therefor
- Publication number 20040251424
- Publication date Dec 16, 2004
- SUMITOMO EATON NOVA CORPORATION
- Hirohiko Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion beam mass separation filter, mass separation method thereof and...
- Publication number 20030168588
- Publication date Sep 11, 2003
- SUMITOMO EATON NOVA CORPORATION
- Adam Brailove
- H01 - BASIC ELECTRIC ELEMENTS