Hirohiko Yamamoto

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Mounting table structure, and processing apparatus
- Patent number 8,334,481
- Issue date Dec 18, 2012
- Tokyo Electron Limited
- Tomohito Komatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
STAGE STRUCTURE AND HEAT TREATMENT APPARATUS
- Publication number 20100323313
- Publication date Dec 23, 2010
- TOKYO ELECRON LIMITED
- Daisuke Toriya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOUNTING TABLE STRUCTURE, AND PROCESSING APPARATUS
- Publication number 20090277895
- Publication date Nov 12, 2009
- TOKYO ELECTRON LIMITED
- Tomohito KOMATSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...