Hirohisa Hirayanagi

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Hachioji-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Ion beam generator, and substrate processing apparatus and producti...
- Patent number 8,536,539
- Issue date Sep 17, 2013
- Canon Anelva Corporation
- Hirohisa Hirayanagi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20140230728
- Publication date Aug 21, 2014
- Canon ANELVA Corporation
- Yuji Kajihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND M...
- Publication number 20120104274
- Publication date May 3, 2012
- Canon ANELVA Corporation
- Hirohisa Hirayanagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ion Beam Generator, and Substrate Processing Apparatus and Producti...
- Publication number 20110147200
- Publication date Jun 23, 2011
- Canon ANELVA Corporation
- Hirohisa Hirayanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS
- Publication number 20090078569
- Publication date Mar 26, 2009
- Canon ANELVA Corporation
- Hirohisa Hirayanagi
- H01 - BASIC ELECTRIC ELEMENTS