Hirohisa Tanaka

Person

Meguro-Ku, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Illumination optical system, exposure apparatus, device production...
- Patent number 10,691,026
- Issue date Jun 23, 2020
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Grant
Illumination optical assembly, exposure apparatus, and device manuf...
- Patent number 10,578,973
- Issue date Mar 3, 2020
- Nikon Corporation
- Hirohisa Tanaka
- G02 - OPTICS
Information Patent Grant
Illumination optical system, exposure apparatus, device production...
- Patent number 10,175,583
- Issue date Jan 8, 2019
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Grant
Illumination optical system, exposure apparatus, device production...
- Patent number 9,599,905
- Issue date Mar 21, 2017
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical assembly, exposure apparatus, and device manuf...
- Patent number 9,513,560
- Issue date Dec 6, 2016
- Nikon Corporation
- Hirohisa Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lighting optical device, regulation method for lighting optical dev...
- Patent number 9,235,133
- Issue date Jan 12, 2016
- Nikon Corporation
- Hirohisa Tanaka
- G02 - OPTICS
Information Patent Grant
Illumination optical apparatus, exposure apparatus, and device manu...
- Patent number 9,195,069
- Issue date Nov 24, 2015
- Nikon Corporation
- Hirohisa Tanaka
- G02 - OPTICS
Information Patent Grant
Illumination optical system, exposure apparatus, and device manufac...
- Patent number 8,947,635
- Issue date Feb 3, 2015
- Nikon Corporation
- Hirohisa Tanaka
- G02 - OPTICS
Information Patent Grant
Illumination optical system, exposure apparatus, device manufacturi...
- Patent number 8,908,151
- Issue date Dec 9, 2014
- Nikon Corporation
- Kouji Muramatsu
- G02 - OPTICS
Information Patent Grant
Illumination optical system, exposure apparatus, and device manufac...
- Patent number 8,520,291
- Issue date Aug 27, 2013
- Nikon Corporation
- Hirohisa Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system, exposure apparatus, and device manufac...
- Patent number 8,508,717
- Issue date Aug 13, 2013
- Nikon Corporation
- Hirohisa Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical apparatus, exposure apparatus, and device manu...
- Patent number 8,493,549
- Issue date Jul 23, 2013
- Nikon Corporation
- Hirohisa Tanaka
- G02 - OPTICS
Information Patent Grant
Illumination optical system, exposure apparatus, and device manufac...
- Patent number 8,462,317
- Issue date Jun 11, 2013
- Nikon Corporation
- Hirohisa Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection device and inspecting method for spatial light modulator...
- Patent number 8,456,624
- Issue date Jun 4, 2013
- Nikon Corporation
- Osamu Tanitsu
- G01 - MEASURING TESTING
Information Patent Grant
Illumination optical system, exposure apparatus, and device manufac...
- Patent number 8,451,430
- Issue date May 28, 2013
- Nikon Corporation
- Hirohisa Tanaka
- G02 - OPTICS
Information Patent Grant
Inspection device and inspecting method for spatial light modulator...
- Patent number 8,446,579
- Issue date May 21, 2013
- Nikon Corporation
- Osamu Tanitsu
- G01 - MEASURING TESTING
Information Patent Grant
Illumination optics apparatus, exposure method, exposure apparatus,...
- Patent number 8,300,213
- Issue date Oct 30, 2012
- Nikon Corporation
- Hirohisa Tanaka
- F21 - LIGHTING
Information Patent Grant
Variable attenuator device and method
- Patent number 8,116,342
- Issue date Feb 14, 2012
- Nikon Corporation
- Daniel G. Smith
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Illumination optical apparatus, exposure apparatus, and device manu...
- Patent number 8,094,290
- Issue date Jan 10, 2012
- Nikon Corporation
- Soichi Owa
- G02 - OPTICS
Information Patent Grant
Illumination optical system, exposure apparatus, and exposure metho...
- Patent number 7,515,247
- Issue date Apr 7, 2009
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system, exposure apparatus, and exposure metho...
- Patent number 7,515,248
- Issue date Apr 7, 2009
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system, exposure apparatus, and exposure metho...
- Patent number 7,423,731
- Issue date Sep 9, 2008
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Variable valve system of internal combustion engine and hydraulic a...
- Patent number 7,178,489
- Issue date Feb 20, 2007
- Yokohama TLO Company, Ltd.
- Hirohisa Tanaka
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Pressure-storage type fuel injection device for internal combustion...
- Patent number 6,945,469
- Issue date Sep 20, 2005
- Moog Japan Ltd.
- Hirohisa Tanaka
- F02 - COMBUSTION ENGINES HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
Information Patent Grant
Optical illumination device, exposure device and exposure method
- Patent number 6,913,373
- Issue date Jul 5, 2005
- Nikon Corporation
- Hirohisa Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Toroidal type continuously variable transmission
- Patent number 6,488,607
- Issue date Dec 3, 2002
- NSK Ltd.
- Hirohisa Tanaka
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Device for changing the speeds of the front and rear wheels in a fo...
- Patent number 6,480,778
- Issue date Nov 12, 2002
- Isuzu Motors Limited
- Hirohisa Tanaka
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Device for changing the speeds of the front and rear wheels in a fo...
- Patent number 6,438,480
- Issue date Aug 20, 2002
- Isuzu Motors Limited
- Hirohisa Tanaka
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Damper device for rotary motion
- Patent number 5,855,518
- Issue date Jan 5, 1999
- NSK Ltd.
- Hirohisa Tanaka
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Method for controlling driving of a ram of a hydraulic cylinder of...
- Patent number 5,743,165
- Issue date Apr 28, 1998
- Nisshinbo Industries, Inc.
- Hirohisa Tanaka
- B30 - PRESSES

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION...
- Publication number 20190137887
- Publication date May 9, 2019
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION...
- Publication number 20170184978
- Publication date Jun 29, 2017
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL ASSEMBLY, EXPOSURE APPARATUS, AND DEVICE MANUF...
- Publication number 20170045824
- Publication date Feb 16, 2017
- Nikon Corporation
- Hirohisa Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL ASSEMBLY, EXPOSURE APPARATUS, AND DEVICE MANUF...
- Publication number 20140307245
- Publication date Oct 16, 2014
- NIKON CORPORATION
- Hirohisa Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION...
- Publication number 20140233008
- Publication date Aug 21, 2014
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICS APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS,...
- Publication number 20130114058
- Publication date May 9, 2013
- Nikon Corporation
- Hirohisa Tanaka
- F21 - LIGHTING
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFAC...
- Publication number 20120236284
- Publication date Sep 20, 2012
- Nikon Corporation
- Hirohisa TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD
- Publication number 20120236285
- Publication date Sep 20, 2012
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INSPECTION DEVICE AND INSPECTING METHOD FOR SPATIAL LIGHT MODULATOR...
- Publication number 20120171627
- Publication date Jul 5, 2012
- Nikon Corporation
- Osamu TANITSU
- G01 - MEASURING TESTING
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFAC...
- Publication number 20120015306
- Publication date Jan 19, 2012
- Niko Corporation
- Hirohisa TANAKA
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFAC...
- Publication number 20120013877
- Publication date Jan 19, 2012
- Nikon Corporation
- Hirohisa Tanaka
- G02 - OPTICS
Information Patent Application
INSPECTION DEVICE AND INSPECTING METHOD FOR SPATIAL LIGHT MODULATOR...
- Publication number 20110069305
- Publication date Mar 24, 2011
- Nikon Corporation
- Osamu TANITSU
- G01 - MEASURING TESTING
Information Patent Application
SPATIAL LIGHT MODULATING UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSUR...
- Publication number 20110027724
- Publication date Feb 3, 2011
- Nikon Corporation
- Hirohisa TANAKA
- G02 - OPTICS
Information Patent Application
Illumination optical system, exposure apparatus, and exposure method
- Publication number 20100225895
- Publication date Sep 9, 2010
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical system, exposure apparatus, and exposure method
- Publication number 20100149511
- Publication date Jun 17, 2010
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical system, exposure apparatus, device manufacturi...
- Publication number 20090284727
- Publication date Nov 19, 2009
- Nikon Corporation
- Kouji Muramatsu
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE MANUFACTURI...
- Publication number 20090257043
- Publication date Oct 15, 2009
- Nikon Corporation
- Takashi MORI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATING OPTICAL APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUF...
- Publication number 20090135396
- Publication date May 28, 2009
- Nikon Corporation
- Yasushi Mizuno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optics apparatus, exposure method, exposure apparatus,...
- Publication number 20090128796
- Publication date May 21, 2009
- NIKON CORPORATION
- Hirohisa Tanaka
- F21 - LIGHTING
Information Patent Application
ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANU...
- Publication number 20090115990
- Publication date May 7, 2009
- NIKON CORPORATION
- Soichi Owa
- G02 - OPTICS
Information Patent Application
LIGHTING OPTICAL SYSTEM, EXPOSURE SYSTEM, AND EXPOSURE METHOD
- Publication number 20090115989
- Publication date May 7, 2009
- Hirohisa Tanaka
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFAC...
- Publication number 20090097007
- Publication date Apr 16, 2009
- Hirohisa Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFAC...
- Publication number 20090097094
- Publication date Apr 16, 2009
- Hirohisa Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SPATIAL LIGHT MODULATION UNIT, ILLUMINATION APPARATUS, EXPOSURE APP...
- Publication number 20090091730
- Publication date Apr 9, 2009
- NIKON CORPORATION
- Hirohisa Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical apparatus, exposure apparatus, and device manu...
- Publication number 20090002671
- Publication date Jan 1, 2009
- Nikon Corporation
- Hirohisa Tanaka
- G02 - OPTICS
Information Patent Application
Variable Attenuator Device and Method
- Publication number 20080240182
- Publication date Oct 2, 2008
- Nikon Corporation
- Daniel G. Smith
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Illumination optical system, exposure apparatus, and exposure method
- Publication number 20080239274
- Publication date Oct 2, 2008
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical system, exposure apparatus, and exposure method
- Publication number 20080094602
- Publication date Apr 24, 2008
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical system, exposure apparatus, and exposure method
- Publication number 20080074632
- Publication date Mar 27, 2008
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lighting Optical Device, Regulation Method for Lighting Optical Dev...
- Publication number 20080030707
- Publication date Feb 7, 2008
- Nikon Corporation
- Hirohisa Tanaka
- G02 - OPTICS

Hirohisa Tanaka

Person

Patents Grantslast 30 patents

Illumination optical system, exposure apparatus, device production...

Illumination optical assembly, exposure apparatus, and device manuf...

Illumination optical system, exposure apparatus, device production...

Illumination optical system, exposure apparatus, device production...

Illumination optical assembly, exposure apparatus, and device manuf...

Lighting optical device, regulation method for lighting optical dev...

Illumination optical apparatus, exposure apparatus, and device manu...

Illumination optical system, exposure apparatus, and device manufac...

Illumination optical system, exposure apparatus, device manufacturi...

Illumination optical system, exposure apparatus, and device manufac...

Illumination optical system, exposure apparatus, and device manufac...

Illumination optical apparatus, exposure apparatus, and device manu...

Illumination optical system, exposure apparatus, and device manufac...

Inspection device and inspecting method for spatial light modulator...

Illumination optical system, exposure apparatus, and device manufac...

Inspection device and inspecting method for spatial light modulator...

Illumination optics apparatus, exposure method, exposure apparatus,...

Variable attenuator device and method

Illumination optical apparatus, exposure apparatus, and device manu...

Illumination optical system, exposure apparatus, and exposure metho...

Illumination optical system, exposure apparatus, and exposure metho...

Illumination optical system, exposure apparatus, and exposure metho...

Variable valve system of internal combustion engine and hydraulic a...

Pressure-storage type fuel injection device for internal combustion...

Optical illumination device, exposure device and exposure method

Toroidal type continuously variable transmission

Device for changing the speeds of the front and rear wheels in a fo...

Device for changing the speeds of the front and rear wheels in a fo...

Damper device for rotary motion

Method for controlling driving of a ram of a hydraulic cylinder of...

Patents Applicationslast 30 patents

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION...

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION...

ILLUMINATION OPTICAL ASSEMBLY, EXPOSURE APPARATUS, AND DEVICE MANUF...

ILLUMINATION OPTICAL ASSEMBLY, EXPOSURE APPARATUS, AND DEVICE MANUF...

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION...

ILLUMINATION OPTICS APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS,...

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFAC...

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD

INSPECTION DEVICE AND INSPECTING METHOD FOR SPATIAL LIGHT MODULATOR...

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFAC...

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFAC...

INSPECTION DEVICE AND INSPECTING METHOD FOR SPATIAL LIGHT MODULATOR...

SPATIAL LIGHT MODULATING UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSUR...

Illumination optical system, exposure apparatus, and exposure method

Illumination optical system, exposure apparatus, and exposure method

Illumination optical system, exposure apparatus, device manufacturi...

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE MANUFACTURI...

ILLUMINATING OPTICAL APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUF...

Illumination optics apparatus, exposure method, exposure apparatus,...

ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANU...

LIGHTING OPTICAL SYSTEM, EXPOSURE SYSTEM, AND EXPOSURE METHOD

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFAC...

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFAC...

SPATIAL LIGHT MODULATION UNIT, ILLUMINATION APPARATUS, EXPOSURE APP...

Illumination optical apparatus, exposure apparatus, and device manu...

Variable Attenuator Device and Method

Illumination optical system, exposure apparatus, and exposure method

Illumination optical system, exposure apparatus, and exposure method

Illumination optical system, exposure apparatus, and exposure method

Lighting Optical Device, Regulation Method for Lighting Optical Dev...