Hirohisa YAMAZAKI

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Vaporizer, substrate processing apparatus and method for manufactur...
- Patent number 11,970,771
- Issue date Apr 30, 2024
- Kokusai Electric Corporation
- Atsushi Morikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer, substrate processing apparatus and method of manufacturi...
- Patent number 11,873,555
- Issue date Jan 16, 2024
- Kokusai Electric Corporation
- Gen Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vaporizer, substrate processing apparatus, and method of manufactur...
- Patent number 11,866,822
- Issue date Jan 9, 2024
- Kokusai Electric Corporation
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,542,603
- Issue date Jan 3, 2023
- Kokusai Electric Corporation
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method for manufacturing semiconduc...
- Patent number 11,293,096
- Issue date Apr 5, 2022
- Kokusai Electric Corporation
- Atsushi Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device, non-transitory compu...
- Patent number 10,910,217
- Issue date Feb 2, 2021
- Kokusai Electric Corporation
- Yoshimasa Nagatomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device, non-transitory compu...
- Patent number 10,707,074
- Issue date Jul 7, 2020
- Kokusai Electric Corporation
- Yoshimasa Nagatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,297,440
- Issue date May 21, 2019
- Kokusai Electric Corporation
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for processing substrate and substrate processing apparatus
- Patent number 9,768,012
- Issue date Sep 19, 2017
- Hitachi Kokusai Electric Inc.
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, cleaning method, subs...
- Patent number 9,401,282
- Issue date Jul 26, 2016
- Hitachi Kokusai Electric Inc.
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 9,206,931
- Issue date Dec 8, 2015
- Hitachi Kokusai Electric Inc.
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method for manufacturing semicon...
- Patent number 8,828,141
- Issue date Sep 9, 2014
- Hitachi Kokusai Electric Inc.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 8,741,731
- Issue date Jun 3, 2014
- Hitachi Kokusai Electric Inc.
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 8,741,063
- Issue date Jun 3, 2014
- Hitachi Kokusai Electric Inc.
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system
- Patent number 8,641,829
- Issue date Feb 4, 2014
- Hitachi Kokusai Electric Inc.
- Tomoki Horita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and producing method of semiconducto...
- Patent number 8,598,047
- Issue date Dec 3, 2013
- Hitachi Kokusai Electric Inc.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system
- Patent number 8,506,714
- Issue date Aug 13, 2013
- Hitachi Kokusai Electric Inc.
- Tomoki Horita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device and processing appar...
- Patent number 8,481,434
- Issue date Jul 9, 2013
- Hitachi Kokusai Electric Inc.
- Hironobu Miya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method for manufacturing semicon...
- Patent number 8,461,062
- Issue date Jun 11, 2013
- Hitachi Kokusai Electric Inc.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 8,420,552
- Issue date Apr 16, 2013
- Hitachi Kokusai Electric Inc.
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device background
- Patent number 7,662,727
- Issue date Feb 16, 2010
- Hitachi Kokusai Electric Inc.
- Hironobu Miya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for fabricating a semiconductor device and a substrate proce...
- Patent number 6,686,281
- Issue date Feb 3, 2004
- Hitachi Kokusai Electric Inc.
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20240105461
- Publication date Mar 28, 2024
- Kokusai Electric Corporation
- Hirohisa YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPORIZER, PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICON...
- Publication number 20240093361
- Publication date Mar 21, 2024
- Kokusai Electric Corporation
- Gen LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...
- Publication number 20230098746
- Publication date Mar 30, 2023
- Kokusai Electric Corporation
- Yoshimasa NAGATOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Substrate Processing Method, Method...
- Publication number 20230081219
- Publication date Mar 16, 2023
- Kokusai Electric Corporation
- Hirohisa YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, EXHAUST DEVICE AND METHOD OF MANUFA...
- Publication number 20220403511
- Publication date Dec 22, 2022
- Kokusai Electric Corporation
- Hirohisa YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20220186368
- Publication date Jun 16, 2022
- Hitachi Kokusai Electric Inc.
- Atsushi MORIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20220090260
- Publication date Mar 24, 2022
- Kokusai Electric Corporation
- Hirohisa YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPORIZER, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURI...
- Publication number 20210292895
- Publication date Sep 23, 2021
- Kokusai Electric Corporation
- Gen LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND...
- Publication number 20210193486
- Publication date Jun 24, 2021
- Kokusai Electric Corporation
- Gen LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPORIZER, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTUR...
- Publication number 20210079523
- Publication date Mar 18, 2021
- Kokusai Electric Corporation
- Hirohisa YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPU...
- Publication number 20200294790
- Publication date Sep 17, 2020
- Kokusai Electric Corporation
- Yoshimasa NAGATOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE RETRAINER AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180286725
- Publication date Oct 4, 2018
- Hitachi Kokusai Electric Inc.
- Kazuki NONOMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPU...
- Publication number 20180286662
- Publication date Oct 4, 2018
- Hitachi Kokusai Electric Inc.
- Yoshimasa NAGATOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20180135176
- Publication date May 17, 2018
- Hitachi Kokusai Electric Inc.
- Atsushi MORIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20170092490
- Publication date Mar 30, 2017
- Hitachi Kokusai Electric Inc.
- Hirohisa YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150243493
- Publication date Aug 27, 2015
- Hitachi Kokusai Electric Inc.
- Hirohisa YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20140182515
- Publication date Jul 3, 2014
- Hitachi Kokusai Electric Inc.
- Hirohisa YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20140166145
- Publication date Jun 19, 2014
- Hitachi Kokusai Electric Inc.
- Hirohisa YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20140170860
- Publication date Jun 19, 2014
- Hitachi Kokusai Electric Inc.
- Hirohisa YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20130298947
- Publication date Nov 14, 2013
- Tomoki HORITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device, Cleaning Method, Subs...
- Publication number 20130260566
- Publication date Oct 3, 2013
- Hitachi Kokusai Electric Inc.
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20130122720
- Publication date May 16, 2013
- Hitachi Kokusai Electric Inc.
- Yuji TAKEBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20120319252
- Publication date Dec 20, 2012
- Hitachi Kokusai Electric Inc.
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20120280369
- Publication date Nov 8, 2012
- Hitachi Kokusai Electric Inc.
- Tatsuyuki Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICON...
- Publication number 20120122318
- Publication date May 17, 2012
- Hitachi Kokusai Electric Inc.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20120079985
- Publication date Apr 5, 2012
- Hitachi Kokusai Electric Inc.
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PRODUCING METHOD OF SEMICONDUCTO...
- Publication number 20120034788
- Publication date Feb 9, 2012
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE,...
- Publication number 20110024875
- Publication date Feb 3, 2011
- Hitachi Kokusai Electric Inc.
- Yuji TAKEBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20100186774
- Publication date Jul 29, 2010
- Hironobu Miya
- B08 - CLEANING
Information Patent Application
Substrate processing apparatus
- Publication number 20100162952
- Publication date Jul 1, 2010
- Hitachi Kokusai Electric Inc.
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hirohisa YAMAZAKI

Person

Patents Grantslast 30 patents

Vaporizer, substrate processing apparatus and method for manufactur...

Vaporizer, substrate processing apparatus and method of manufacturi...

Vaporizer, substrate processing apparatus, and method of manufactur...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method for manufacturing semiconduc...

Method for manufacturing semiconductor device, non-transitory compu...

Method for manufacturing semiconductor device, non-transitory compu...

Method of manufacturing semiconductor device

Method for processing substrate and substrate processing apparatus

Method of manufacturing semiconductor device, cleaning method, subs...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus and method for manufacturing semicon...

Method of manufacturing a semiconductor device

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing system

Substrate processing apparatus and producing method of semiconducto...

Substrate processing system

Method of manufacturing a semiconductor device and processing appar...

Substrate processing apparatus and method for manufacturing semicon...

Method of manufacturing a semiconductor device

Method for manufacturing semiconductor device background

Method for fabricating a semiconductor device and a substrate proce...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

VAPORIZER, PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICON...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...

Substrate Processing Apparatus, Substrate Processing Method, Method...

SUBSTRATE PROCESSING APPARATUS, EXHAUST DEVICE AND METHOD OF MANUFA...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

VAPORIZER, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURI...

CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND...

VAPORIZER, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTUR...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPU...

SUBSTRATE RETRAINER AND SUBSTRATE PROCESSING APPARATUS

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPU...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD FOR PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING SYSTEM

Method of Manufacturing Semiconductor Device, Cleaning Method, Subs...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICON...

METHOD FOR PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND PRODUCING METHOD OF SEMICONDUCTO...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE,...

CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS

Substrate processing apparatus