Hirohito Ito

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged-particle beam exposure apparatus and method of manufacturin...
- Patent number 8,981,321
- Issue date Mar 17, 2015
- Canon Kabushiki Kaisha
- Hirohito Ito
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning apparatus, drawing apparatus, and method of manufacturing...
- Patent number 8,829,461
- Issue date Sep 9, 2014
- Canon Kabushiki Kaisha
- Hirohito Ito
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Positioning apparatus, exposure apparatus, and device manufacturing...
- Patent number 8,625,077
- Issue date Jan 7, 2014
- Canon Kabushiki Kaisha
- Hirohito Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged-particle beam exposure apparatus and method of manufacturin...
- Patent number 8,618,516
- Issue date Dec 31, 2013
- Canon Kabushiki Kaisha
- Hirohito Ito
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint apparatus and method for producing article
- Patent number 8,562,323
- Issue date Oct 22, 2013
- Canon Kabushiki Kaisha
- Hirohito Ito
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Optical unit and exposure apparatus having the same
- Patent number 7,771,065
- Issue date Aug 10, 2010
- Canon Kabushiki Kaisha
- Choshoku Sai
- G02 - OPTICS
Information Patent Grant
Alignment apparatus
- Patent number 7,738,232
- Issue date Jun 15, 2010
- Canon Kabushiki Kaisha
- Hirohito Ito
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Optical element driving apparatus
- Patent number 7,710,626
- Issue date May 4, 2010
- Canon Kabushiki Kaisha
- Hirohito Ito
- G02 - OPTICS
Information Patent Grant
Fluid control mechanism
- Patent number 7,530,795
- Issue date May 12, 2009
- Canon Kabushiki Kaisha
- Hirohito Ito
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Grant
Reflecting mirror and exposure apparatus using the same
- Patent number 7,453,623
- Issue date Nov 18, 2008
- Canon Kabushiki Kaisha
- Shinji Uchida
- G02 - OPTICS
Information Patent Grant
Optical micromotor, micropump using same and microvalve using same
- Patent number 7,444,817
- Issue date Nov 4, 2008
- Canon Kabushiki Kaisha
- Hirohito Ito
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Optical element holding apparatus, exposure apparatus and device ma...
- Patent number 7,443,619
- Issue date Oct 28, 2008
- Canon Kabushiki Kaisha
- Shigeo Sakino
- G02 - OPTICS
Information Patent Grant
Positioning device, exposure device, and device manufacturing method
- Patent number 6,359,679
- Issue date Mar 19, 2002
- Canon Kabushiki Kaisha
- Hirohito Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning apparatus and exposure apparatus using the same
- Patent number 6,028,376
- Issue date Feb 22, 2000
- Canon Kabushiki Kaisha
- Eiji Osanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device, method of controlling same, and exposure apparatus us...
- Patent number 6,008,882
- Issue date Dec 28, 1999
- Canon Kabushiki Kaisha
- Hirohito Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage feeding device
- Patent number 5,939,852
- Issue date Aug 17, 1999
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20160257060
- Publication date Sep 8, 2016
- Canon Kabushiki Kaisha
- Hirohito Ito
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
COMMAND DATA GENERATION METHOD, POSITIONING APPARATUS, LITHOGRAPHY...
- Publication number 20150378342
- Publication date Dec 31, 2015
- Canon Kabushiki Kaisha
- Hirohito Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING AN ARTICLE
- Publication number 20150303025
- Publication date Oct 22, 2015
- Canon Kabushiki Kaisha
- Hirohito Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20140162191
- Publication date Jun 12, 2014
- Canon Kabushiki Kaisha
- Hirohito Ito
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
CHARGED-PARTICLE BEAM EXPOSURE APPARATUS AND METHOD OF MANUFACTURIN...
- Publication number 20140070112
- Publication date Mar 13, 2014
- Canon Kabushiki Kaisha
- Hirohito Ito
- B82 - NANO-TECHNOLOGY
Information Patent Application
SCANNING APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTURING...
- Publication number 20130137044
- Publication date May 30, 2013
- Canon Kabushiki Kaisha
- Hirohito Ito
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED-PARTICLE BEAM EXPOSURE APPARATUS AND METHOD OF MANUFACTURIN...
- Publication number 20120126136
- Publication date May 24, 2012
- Canon Kabushiki Kaisha
- Hirohito Ito
- B82 - NANO-TECHNOLOGY
Information Patent Application
POSITIONING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING...
- Publication number 20110164230
- Publication date Jul 7, 2011
- Canon Kabushiki Kaisha
- Hirohito Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS AND METHOD FOR PRODUCING ARTICLE
- Publication number 20110159189
- Publication date Jun 30, 2011
- Canon Kabushiki Kaisha
- Hirohito Ito
- B82 - NANO-TECHNOLOGY
Information Patent Application
POSITIONING APPARATUS, POSITIONING METHOD, EXPOSURE APPARATUS, DEVI...
- Publication number 20090310145
- Publication date Dec 17, 2009
- Canon Kabushiki Kaisha
- Yusuke Sugiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DRIVING APPARATUS AND EXPOSURE APPARATUS USING THE SAME AND DEVICE...
- Publication number 20090033901
- Publication date Feb 5, 2009
- Canon Kabushiki Kaisha
- Hirohito Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ELEMENT DRIVING APPARATUS
- Publication number 20070280609
- Publication date Dec 6, 2007
- Canon Kabushiki Kaisha
- Hirohito Ito
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT HOLDING APPARATUS, EXPOSURE APPARATUS AND DEVICE MA...
- Publication number 20070076310
- Publication date Apr 5, 2007
- Canon Kabushiki Kaisha
- Shigeo Sakino
- G02 - OPTICS
Information Patent Application
Reflecting mirror and exposure apparatus using the same
- Publication number 20060245035
- Publication date Nov 2, 2006
- Canon Kabushiki Kaisha
- Shinji Uchida
- G02 - OPTICS
Information Patent Application
Optical unit and exposure apparatus having the same
- Publication number 20060232866
- Publication date Oct 19, 2006
- Canon Kabushiki Kaisha
- Choshoku Sai
- G02 - OPTICS
Information Patent Application
Alignment apparatus
- Publication number 20050017831
- Publication date Jan 27, 2005
- Canon Kabushiki Kaisha
- Hirohito Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Fluid control mechanism
- Publication number 20040257668
- Publication date Dec 23, 2004
- Canon Kabushiki Kaisha
- Hirohito Ito
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Application
Optical micromotor, micropump using same and microvalve using same
- Publication number 20040251770
- Publication date Dec 16, 2004
- Canon Kabushiki Kaisha
- Hirohito Ito
- G02 - OPTICS

Hirohito Ito

Person

Patents Grantslast 30 patents

Charged-particle beam exposure apparatus and method of manufacturin...

Scanning apparatus, drawing apparatus, and method of manufacturing...

Positioning apparatus, exposure apparatus, and device manufacturing...

Charged-particle beam exposure apparatus and method of manufacturin...

Imprint apparatus and method for producing article

Optical unit and exposure apparatus having the same

Alignment apparatus

Optical element driving apparatus

Fluid control mechanism

Reflecting mirror and exposure apparatus using the same

Optical micromotor, micropump using same and microvalve using same

Optical element holding apparatus, exposure apparatus and device ma...

Positioning device, exposure device, and device manufacturing method

Positioning apparatus and exposure apparatus using the same

Stage device, method of controlling same, and exposure apparatus us...

Stage feeding device

Patents Applicationslast 30 patents

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

COMMAND DATA GENERATION METHOD, POSITIONING APPARATUS, LITHOGRAPHY...

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING AN ARTICLE

DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

CHARGED-PARTICLE BEAM EXPOSURE APPARATUS AND METHOD OF MANUFACTURIN...

SCANNING APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTURING...

CHARGED-PARTICLE BEAM EXPOSURE APPARATUS AND METHOD OF MANUFACTURIN...

POSITIONING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING...

IMPRINT APPARATUS AND METHOD FOR PRODUCING ARTICLE

POSITIONING APPARATUS, POSITIONING METHOD, EXPOSURE APPARATUS, DEVI...

DRIVING APPARATUS AND EXPOSURE APPARATUS USING THE SAME AND DEVICE...

OPTICAL ELEMENT DRIVING APPARATUS

OPTICAL ELEMENT HOLDING APPARATUS, EXPOSURE APPARATUS AND DEVICE MA...

Reflecting mirror and exposure apparatus using the same

Optical unit and exposure apparatus having the same

Alignment apparatus

Fluid control mechanism

Optical micromotor, micropump using same and microvalve using same