Hirohito Itoh

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Machida, JP

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Patents Grantslast 30 patents

Information Patent Grant
Stage device for an exposure apparatus and semiconductor device man...
- Patent number 6,504,160
- Issue date Jan 7, 2003
- Canon Kabushiki Kaisha
- Hirohito Itoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage device for an exposure apparatus and semiconductor device man...
- Patent number 6,072,183
- Issue date Jun 6, 2000
- Canon Kabushiki Kaisha
- Hirohito Itoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device and pattern transfer system using the same
- Patent number 5,684,856
- Issue date Nov 4, 1997
- Canon Kabushiki Kaisha
- Hirohito Itoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device for an exposure apparatus and semiconductor device man...
- Patent number 5,260,580
- Issue date Nov 9, 1993
- Canon Kabushiki Kaisha
- Hirohito Itoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Stage device for an exposure apparatus and semiconductor device man...
- Publication number 20010045526
- Publication date Nov 29, 2001
- Hirohito Itoh
- H01 - BASIC ELECTRIC ELEMENTS