Hirohito KIKUSHIMA

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Nirasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Cooling mechanism and processing system
- Patent number 10,256,128
- Issue date Apr 9, 2019
- Tokyo Electron Limited
- Keita Kumagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for positioning a transfer unit, method for calculating posi...
- Patent number 9,541,920
- Issue date Jan 10, 2017
- Tokyo Electron Limited
- Masato Kubodera
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
COOLING MECHANISM AND PROCESSING SYSTEM
- Publication number 20150133044
- Publication date May 14, 2015
- TOKYO ELECTRON LIMITED
- Keita Kumagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR POSITIONING A TRANSFER UNIT, METHOD FOR CALCULATING POSI...
- Publication number 20140107825
- Publication date Apr 17, 2014
- TOKYO ELECTRON LIMITED
- Masato KUBODERA
- H01 - BASIC ELECTRIC ELEMENTS