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Hafnium alloy target
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Patent number 8,262,816
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Issue date Sep 11, 2012
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JX Nippon Mining & Metals Corporation
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Takeo Okabe
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C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
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Hafnium alloy target
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Patent number 8,241,438
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Issue date Aug 14, 2012
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JX Nippon Mining & Metals Corporation
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Takeo Okabe
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C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
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Sputtering target
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Patent number 8,177,947
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Issue date May 15, 2012
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JX Nippon Mining & Metals Corporation
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Hirohito Miyashita
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering target producing few particles
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Patent number 6,875,325
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Issue date Apr 5, 2005
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Nikko Materials Company Limited
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Hirohito Miyashita
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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