Hiroichi Inada

Person

Kumamoto-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Solution treatment apparatus and cleaning method
- Patent number 11,868,057
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Kenta Shibasaki
- B08 - CLEANING
Information Patent Grant
Nozzle standby device, liquid processing apparatus and operation me...
- Patent number 11,862,485
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Satoshi Shimmura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,273,464
- Issue date Mar 15, 2022
- Tokyo Electron Limited
- Satoshi Shimmura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Chemical liquid discharge mechanism, liquid processing apparatus, c...
- Patent number 10,755,952
- Issue date Aug 25, 2020
- Tokyo Electron Limited
- Norihiko Sasagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 10,643,872
- Issue date May 5, 2020
- Tokyo Electron Limited
- Masahiro Abe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid processing method and storage medium
- Patent number 10,168,618
- Issue date Jan 1, 2019
- Tokyo Electron Limited
- Norihiko Sasagawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Chemical liquid discharge mechanism, liquid processing apparatus, c...
- Patent number 10,074,548
- Issue date Sep 11, 2018
- Tokyo Electron Limited
- Norihiko Sasagawa
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Liquid processing apparatus, liquid processing method and storage m...
- Patent number 9,195,138
- Issue date Nov 24, 2015
- Tokyo Electron Limited
- Norihiko Sasagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating method
- Patent number 8,808,798
- Issue date Aug 19, 2014
- Tokyo Electron Limited
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating film forming apparatus, use of coating film forming apparat...
- Patent number 8,758,855
- Issue date Jun 24, 2014
- Tokyo Electron Limited
- Nobuhiro Ogata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating method
- Patent number 8,551,563
- Issue date Oct 8, 2013
- Tokyo Electron Limited
- Takahiro Kitano
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus and method of forming an applied film
- Patent number 8,287,954
- Issue date Oct 16, 2012
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating apparatus and method
- Patent number 8,256,370
- Issue date Sep 4, 2012
- Tokyo Electron Limited
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating apparatus and method
- Patent number 8,225,737
- Issue date Jul 24, 2012
- Tokyo Electron Limited
- Takahiro Kitano
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Coating film forming apparatus, use of coating film forming apparat...
- Patent number 8,186,298
- Issue date May 29, 2012
- Tokyo Electron Limited
- Nobuhiro Ogata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus
- Patent number 7,344,600
- Issue date Mar 18, 2008
- Tokyo Electron Limited
- Hiroichi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating unit and coating method
- Patent number 6,982,102
- Issue date Jan 3, 2006
- Tokyo Electron Limited
- Hiroichi Inada
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Processing system
- Patent number 6,919,913
- Issue date Jul 19, 2005
- Tokyo Electron Limited
- Hiroichi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating unit and coating method
- Patent number 6,752,872
- Issue date Jun 22, 2004
- Tokyo, Electron Limited
- Hiroichi Inada
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 6,730,599
- Issue date May 4, 2004
- Tokyo Electron Limited
- Hiroichi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment solution supply apparatus and treatment solution supply m...
- Patent number 6,616,762
- Issue date Sep 9, 2003
- Tokyo Electron Limited
- Hiroichi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 6,541,376
- Issue date Apr 1, 2003
- Tokyo Electron Limited
- Hiroichi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing process and developing unit
- Patent number 6,419,408
- Issue date Jul 16, 2002
- Tokyo Electron Limited
- Hiroichi Inada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing system
- Patent number 6,309,116
- Issue date Oct 30, 2001
- Tokyo Electron Limited
- Koji Mahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing apparatus
- Patent number 6,238,107
- Issue date May 29, 2001
- Tokyo Electron Limited
- Hiroichi Inada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming coating film and apparatus therefor
- Patent number 6,063,190
- Issue date May 16, 2000
- Tokyo Electron Limited
- Keizo Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Solvent and resist spin coating apparatus
- Patent number 5,942,035
- Issue date Aug 24, 1999
- Tokyo Electron Limited
- Keizo Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming coating film and apparatus therefor
- Patent number 5,658,615
- Issue date Aug 19, 1997
- Tokyo Electron Limited
- Keizo Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for developing resist coated on a substrate
- Patent number 5,625,433
- Issue date Apr 29, 1997
- Tokyo Electron Limited
- Hiroichi Inada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SOLUTION TREATMENT APPARATUS AND CLEANING METHOD
- Publication number 20240085813
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Kenta SHIBASAKI
- B08 - CLEANING
Information Patent Application
SOLUTION TREATMENT APPARATUS AND CLEANING METHOD
- Publication number 20220113643
- Publication date Apr 14, 2022
- TOKYO ELECTRON LIMITED
- Kenta SHIBASAKI
- B08 - CLEANING
Information Patent Application
NOZZLE STANDBY DEVICE, LIQUID PROCESSING APPARATUS AND OPERATION ME...
- Publication number 20220084844
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Satoshi Shimmura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210039131
- Publication date Feb 11, 2021
- TOKYO ELECTRON LIMITED
- Satoshi Shimmura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
CHEMICAL LIQUID DISCHARGE MECHANISM, LIQUID PROCESSING APPARATUS, C...
- Publication number 20180350633
- Publication date Dec 6, 2018
- TOKYO ELECTRON LIMITED
- Norihiko Sasagawa
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20170358464
- Publication date Dec 14, 2017
- TOKYO ELECTRON LIMITED
- Masahiro Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING METHOD AND STORAGE MEDIUM
- Publication number 20160054653
- Publication date Feb 25, 2016
- TOKYO ELECTRON LIMITED
- Norihiko Sasagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHEMICAL LIQUID DISCHARGE MECHANISM, LIQUID PROCESSING APPARATUS, C...
- Publication number 20160008840
- Publication date Jan 14, 2016
- TOKYO ELECTRON LIMITED
- Norihiko Sasagawa
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING METHOD
- Publication number 20120301612
- Publication date Nov 29, 2012
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING APPARATUS AND METHOD
- Publication number 20120213925
- Publication date Aug 23, 2012
- TOKYO ELECTRON LIMITED
- Takahiro KITANO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Coating Film Forming Apparatus, Use Of Coating Film Forming Apparat...
- Publication number 20120183693
- Publication date Jul 19, 2012
- TOKYO ELECTRON LIMITED
- Nobuhiro OGATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...
- Publication number 20120052190
- Publication date Mar 1, 2012
- TOKYO ELECTRON LIMITED
- Norihiko Sasagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD OF FORMING AN APPLIED FILM
- Publication number 20110008538
- Publication date Jan 13, 2011
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING APPARATUS AND METHOD
- Publication number 20090285984
- Publication date Nov 19, 2009
- TOKYO ELECTRON LIMITED
- Takahiro KITANO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING APPARATUS AND METHOD
- Publication number 20090285991
- Publication date Nov 19, 2009
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING FILM FORMING APPARATUS, USE OF COATING FILM FORMING APPARAT...
- Publication number 20080280054
- Publication date Nov 13, 2008
- TOKYO ELECTRON LIMITED
- Nobuhiro OGATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method of forming an applied film
- Publication number 20070071890
- Publication date Mar 29, 2007
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate treatment apparatus
- Publication number 20050145168
- Publication date Jul 7, 2005
- Hiroichi Inada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Coating unit and coating method
- Publication number 20040175497
- Publication date Sep 9, 2004
- TOKYO ELECTRON LIMITED
- Hiroichi Inada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Film forming method and film forming apparatus
- Publication number 20030099776
- Publication date May 29, 2003
- TOKYO ELECTRON LIMITED
- Hiroichi Inada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Treatment solution supply apparatus and treatment solution supply m...
- Publication number 20020043214
- Publication date Apr 18, 2002
- Hiroichi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating unit and coating method
- Publication number 20020041935
- Publication date Apr 11, 2002
- TOKYO ELECTRON LIMITED
- Hiroichi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming method and film forming apparatus
- Publication number 20020022377
- Publication date Feb 21, 2002
- TOKYO ELECTRON LIMITED
- Hiroichi Inada
- H01 - BASIC ELECTRIC ELEMENTS

Hiroichi Inada

Person

Patents Grantslast 30 patents

Solution treatment apparatus and cleaning method

Nozzle standby device, liquid processing apparatus and operation me...

Substrate processing apparatus

Chemical liquid discharge mechanism, liquid processing apparatus, c...

Liquid processing apparatus, liquid processing method, and storage...

Liquid processing method and storage medium

Chemical liquid discharge mechanism, liquid processing apparatus, c...

Liquid processing apparatus, liquid processing method and storage m...

Coating method

Coating film forming apparatus, use of coating film forming apparat...

Coating method

Apparatus and method of forming an applied film

Coating apparatus and method

Coating apparatus and method

Coating film forming apparatus, use of coating film forming apparat...

Substrate treatment apparatus

Coating unit and coating method

Processing system

Coating unit and coating method

Film forming method and film forming apparatus

Treatment solution supply apparatus and treatment solution supply m...

Film forming method and film forming apparatus

Developing process and developing unit

Substrate processing system

Developing apparatus

Method of forming coating film and apparatus therefor

Solvent and resist spin coating apparatus

Method of forming coating film and apparatus therefor

Apparatus and method for developing resist coated on a substrate

Patents Applicationslast 30 patents

SOLUTION TREATMENT APPARATUS AND CLEANING METHOD

SOLUTION TREATMENT APPARATUS AND CLEANING METHOD

NOZZLE STANDBY DEVICE, LIQUID PROCESSING APPARATUS AND OPERATION ME...

SUBSTRATE PROCESSING APPARATUS

CHEMICAL LIQUID DISCHARGE MECHANISM, LIQUID PROCESSING APPARATUS, C...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...

LIQUID PROCESSING METHOD AND STORAGE MEDIUM

CHEMICAL LIQUID DISCHARGE MECHANISM, LIQUID PROCESSING APPARATUS, C...

COATING METHOD

COATING APPARATUS AND METHOD

Coating Film Forming Apparatus, Use Of Coating Film Forming Apparat...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...

APPARATUS AND METHOD OF FORMING AN APPLIED FILM

COATING APPARATUS AND METHOD

COATING APPARATUS AND METHOD

COATING FILM FORMING APPARATUS, USE OF COATING FILM FORMING APPARAT...

Apparatus and method of forming an applied film

Substrate treatment apparatus

Coating unit and coating method

Film forming method and film forming apparatus

Treatment solution supply apparatus and treatment solution supply m...

Coating unit and coating method

Film forming method and film forming apparatus