Hiroichi Ota

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Iwate, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heat treatment system, heat treatment method, and program
- Patent number 10,640,871
- Issue date May 5, 2020
- Tokyo Electron Limited
- Yuichi Takenaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CONTROL METHOD OF SUBSTRATE PROCESSING APPARATUS
- Publication number 20250199526
- Publication date Jun 19, 2025
- TOKYO ELECTRON LIMITED
- Hiroichi OTA
- G05 - CONTROLLING REGULATING
Information Patent Application
HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND PROGRAM
- Publication number 20160244881
- Publication date Aug 25, 2016
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...