Hiroie MATSUMOTO

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Albany, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Trench and hole patterning with EUV resists using dual frequency ca...
- Patent number 9,818,610
- Issue date Nov 14, 2017
- Tokyo Electron Limited
- Hiroie Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Trench and hole patterning with EUV resists using dual frequency ca...
- Patent number 9,607,834
- Issue date Mar 28, 2017
- Tokyo Electron Limited
- Hiroie Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 9,099,285
- Issue date Aug 4, 2015
- Tokyo Electron Limited
- Hiroie Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TRENCH AND HOLE PATTERNING WITH EUV RESISTS USING DUAL FREQUENCY CA...
- Publication number 20170263443
- Publication date Sep 14, 2017
- TOKYO ELECTRON LIMITED
- Hiroie Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRENCH AND HOLE PATTERNING WITH EUV RESISTS USING DUAL FREQUENCY CA...
- Publication number 20160293405
- Publication date Oct 6, 2016
- TOKYO ELECTRON LIMITED
- Hiroie Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20150287618
- Publication date Oct 8, 2015
- TOKYO ELECTRON LIMITED
- Hiroie MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20140120732
- Publication date May 1, 2014
- TOKYO ELECTRON LIMITED
- Hiroie MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...