Hirokazu Higashijima

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device manufacturing method and substrate treatment s...
- Patent number 9,418,837
- Issue date Aug 16, 2016
- Tokyo Electron Limited
- Koji Akiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication method of semiconductor device
- Patent number 8,741,786
- Issue date Jun 3, 2014
- Tokyo Electron Limited
- Koji Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 8,129,775
- Issue date Mar 6, 2012
- Tokyo Electron Limited
- Koji Akiyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20160181109
- Publication date Jun 23, 2016
- TOKYO ELECTRON LIMITED
- Yasushi Akasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device Manufacturing Method and Substrate Treatment S...
- Publication number 20150017813
- Publication date Jan 15, 2015
- TOKYO ELECTRON LIMITED
- Koji AKIYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20140242789
- Publication date Aug 28, 2014
- TOKYO ELECTRON LIMITED
- Yasushi Akasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...
- Publication number 20140242808
- Publication date Aug 28, 2014
- TOKYO ELECTRON LIMITED
- Koji Akiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATION METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20120309207
- Publication date Dec 6, 2012
- TOKYO ELECTRON LIMITED
- Koji AKIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20100148241
- Publication date Jun 17, 2010
- TOKYO ELECTRON LIMITED
- Koji AKIYAMA
- H01 - BASIC ELECTRIC ELEMENTS