Hirokazu TANIGUCHI

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Hyogo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Optical temperature sensor and method for manufacturing optical tem...
- Patent number 10,139,290
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Takari Yamamoto
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL TEMPERATURE SENSOR AND METHOD FOR MANUFACTURING OPTICAL TEM...
- Publication number 20160363486
- Publication date Dec 15, 2016
- TOKYO ELECTRON LIMITED
- Takari YAMAMOTO
- G01 - MEASURING TESTING