Hirokazu Udea

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Amagasaki-shi, JP

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Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20130065399
- Publication date Mar 14, 2013
- TOKYO ELECTRON LIMITED
- Hirokazu Udea
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR PLASMA-PROCESSING SEMICO...
- Publication number 20100279512
- Publication date Nov 4, 2010
- TOKYO ELECTRON LIMITED
- Hirokazu Udea
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...