Hirokazu Yokoi

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Hyogo, JP

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Patents Applicationslast 30 patents

Information Patent Application
Apparatus and method for manufacturing semiconductor device
- Publication number 20060144420
- Publication date Jul 6, 2006
- Hirokazu Yokoi
- B08 - CLEANING
Information Patent Application
Stocker for semiconductor substrates, storage method therefor and f...
- Publication number 20050274430
- Publication date Dec 15, 2005
- MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- Hirokazu Yokoi
- H01 - BASIC ELECTRIC ELEMENTS