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Hiroki EHARA

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  • Yamanashi, JP
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Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20220384146
    • Publication date Dec 1, 2022
    • TOKYO ELECTRON LIMITED
    • Syouji YAMAGISHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20210110999
    • Publication date Apr 15, 2021
    • TOKYO ELECTRON LIMITED
    • Taro IKEDA
    • H01 - BASIC ELECTRIC ELEMENTS