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Wafer inspection apparatus
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Patent number 11,515,175
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Issue date Nov 29, 2022
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Tokyo Electron Limited
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Shuji Akiyama
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H01 - BASIC ELECTRIC ELEMENTS
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Inspection apparatus
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Patent number 11,486,924
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Issue date Nov 1, 2022
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Tokyo Electron Limited
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Hiroki Hosaka
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G01 - MEASURING TESTING
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Processing apparatus
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Patent number 7,887,280
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Issue date Feb 15, 2011
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Tokyo Electron Limited
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Hiroki Hosaka
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Wafer carrying-in/out apparatus
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Patent number D607424
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Issue date Jan 5, 2010
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Tokyo Electron Limited
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Hiroki Hosaka
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D13 - Equipment for production, distribution, or transformation of energy
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Wafer carrying-in/out apparatus
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Patent number D602882
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Issue date Oct 27, 2009
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Tokyo Electron Limited
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Hiroki Hosaka
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D13 - Equipment for production, distribution, or transformation of energy
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Wafer carrying-in/out machine
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Patent number D592230
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Issue date May 12, 2009
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Tokyo Electron Limited
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Hiroki Hosaka
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D15 - Machines not elsewhere specified
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Semiconductor wafer delivery apparatus
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Patent number D571739
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Issue date Jun 24, 2008
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Tokyo Electron Limited
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Hiroki Hosaka
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D13 - Equipment for production, distribution, or transformation of energy
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Semiconductor wafer delivery apparatus
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Patent number D571740
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Issue date Jun 24, 2008
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Tokyo Electron Limited
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Hiroki Hosaka
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D13 - Equipment for production, distribution, or transformation of energy
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Semiconductor wafer delivery apparatus
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Patent number D568837
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Issue date May 13, 2008
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Tokyo Electron Limited
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Hiroki Hosaka
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D13 - Equipment for production, distribution, or transformation of energy
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