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Large scale integrated circuit device
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Patent number 5,561,326
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Issue date Oct 1, 1996
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Mitsubishi Denki Kabushiki Kaisha
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Hiroki Ito
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Thin film deposition apparatus
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Patent number 5,525,158
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Issue date Jun 11, 1996
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Mitsubishi Denki Kabushiki Kaisha
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Hisashi Tsukazaki
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Thin film-forming apparatus
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Patent number 5,354,445
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Issue date Oct 11, 1994
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Mitsubishi Denki Kabushiki Kaisha
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Hiroki Ito
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Thin film deposition apparatus
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Patent number 5,180,477
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Issue date Jan 19, 1993
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Mitsubishi Denki Kabushiki Kaisha
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Hiroki Ito
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Apparatus for forming thin film
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Patent number 5,100,526
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Issue date Mar 31, 1992
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Mitsubishi Denki Kabushiki Kaisha
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Hiroki Ito
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate cleaning device
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Patent number 5,054,421
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Issue date Oct 8, 1991
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Mitsubishi Denki K.K.
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Hiroki Ito
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Thin film forming device
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Patent number 4,890,575
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Issue date Jan 2, 1990
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Mitsubishi Denki Kabushiki Kaisha
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Hiroki Ito
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Apparatus for forming a thin film
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Patent number 4,799,454
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Issue date Jan 24, 1989
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Mitsubishi Denki Kabushiki Kaisha
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Hiroki Ito
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...