Hiroki Kawada

Person

Ishioka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Pattern shape evaluation device, pattern shape evaluation system, a...
- Patent number 11,713,963
- Issue date Aug 1, 2023
- HITACHI HIGH-TECH CORPORATION
- Atsuko Shintani
- G01 - MEASURING TESTING
Information Patent Grant
Pattern measurement method and pattern measurement device
- Patent number 10,816,333
- Issue date Oct 27, 2020
- HITACHI HIGH-TECH CORPORATION
- Hiroki Kawada
- G01 - MEASURING TESTING
Information Patent Grant
Pattern measuring method and pattern measuring apparatus
- Patent number 10,665,424
- Issue date May 26, 2020
- HITACHI HIGH-TECH CORPORATION
- Hiroki Kawada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measurement device, calibration method of measurement device, and c...
- Patent number 10,438,771
- Issue date Oct 8, 2019
- Hitachi High-Technologies Corporation
- Michio Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern height measurement device and charged particle beam device
- Patent number 10,393,509
- Issue date Aug 27, 2019
- Hitachi High-Technologies Corporation
- Hiroki Kawada
- G01 - MEASURING TESTING
Information Patent Grant
Pattern measurement method and pattern measurement device
- Patent number 10,184,790
- Issue date Jan 22, 2019
- Hitachi High-Technologies Corporation
- Hiroki Kawada
- G01 - MEASURING TESTING
Information Patent Grant
Height measurement device and charged particle beam device
- Patent number 10,101,150
- Issue date Oct 16, 2018
- Hitachi High-Technologies Corporation
- Hiroki Kawada
- G01 - MEASURING TESTING
Information Patent Grant
Measurement system and measurement method
- Patent number 10,002,743
- Issue date Jun 19, 2018
- Hitachi High-Technologies Corporation
- Shoji Hotta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Control device, charged particle beam apparatus, program and method...
- Patent number 9,934,940
- Issue date Apr 3, 2018
- Hitachi High-Tech Science Corporation
- Satoshi Tomimatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for estimating shape before shrink and CD-SEM apparatus
- Patent number 9,830,524
- Issue date Nov 28, 2017
- Hitachi High-Technologies Corporation
- Tomoko Sekiguchi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam device and inspection device
- Patent number 9,824,938
- Issue date Nov 21, 2017
- Hitachi High-Technologies Corporation
- Atsuko Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image processing device, charged particle beam device, charged part...
- Patent number 9,702,695
- Issue date Jul 11, 2017
- Hitachi High-Technologies Corporation
- Hiroki Kawada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and device for line pattern shape evaluation
- Patent number 9,658,063
- Issue date May 23, 2017
- Hitachi High-Technologies Corporation
- Atsuko Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement method, image processing device, and charged particle b...
- Patent number 9,536,170
- Issue date Jan 3, 2017
- Hitachi High-Technologies Corporation
- Takeyoshi Ohashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measuring method, data processing apparatus and electron microscope...
- Patent number 9,305,744
- Issue date Apr 5, 2016
- Hitachi High-Technologies Corporation
- Takeyoshi Ohashi
- G01 - MEASURING TESTING
Information Patent Grant
Pattern dimension measurement method and charged particle beam appa...
- Patent number 9,297,649
- Issue date Mar 29, 2016
- Hitachi High-Technologies Corporation
- Hiroki Kawada
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor inspection device and semiconductor inspection method...
- Patent number 9,123,504
- Issue date Sep 1, 2015
- Hitachi High-Technologies Corporation
- Atsuko Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring displacement between patterns an...
- Patent number 9,000,366
- Issue date Apr 7, 2015
- Hitachi High-Technologies Corporation
- Atsuko Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tool-to-tool matching control method and its system for scanning el...
- Patent number 8,502,144
- Issue date Aug 6, 2013
- Hitachi High-Technologies Corporation
- Mayuka Oosaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and CD measurement calibration standar...
- Patent number 8,399,832
- Issue date Mar 19, 2013
- Hitachi High-Technologies
- Takeshi Mizuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Length measurement system
- Patent number 8,369,602
- Issue date Feb 5, 2013
- Hitachi High-Technologies Corporation
- Atsuko Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning electron microscope and image signal processing method
- Patent number 8,362,426
- Issue date Jan 29, 2013
- Hitachi High-Technologies Corporation
- Atsushi Kobaru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for data analysis
- Patent number 8,300,919
- Issue date Oct 30, 2012
- Hitachi High-Technologies Corporation
- Atsuko Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus and methods for capturing images us...
- Patent number 8,207,512
- Issue date Jun 26, 2012
- Hitachi High-Technologies Corporation
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image forming method and charged particle beam apparatus
- Patent number 8,203,504
- Issue date Jun 19, 2012
- Hitachi High-Technologies Corporation
- Atsushi Kobaru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample dimension measuring method and scanning electron microscope
- Patent number 8,080,789
- Issue date Dec 20, 2011
- Hitachi, Ltd.
- Osamu Nasu
- G01 - MEASURING TESTING
Information Patent Grant
Sample and method for evaluating resolution of scanning electron mi...
- Patent number 8,022,356
- Issue date Sep 20, 2011
- Hitachi High-Technologies Corporation
- Mayuka Oosaki
- G01 - MEASURING TESTING
Information Patent Grant
Tool-to-tool matching control method and its system for scanning el...
- Patent number 8,003,940
- Issue date Aug 23, 2011
- Hitachi High-Technologies Corporation
- Mayuka Oosaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample dimension measuring method and scanning electron microscope
- Patent number 7,910,886
- Issue date Mar 22, 2011
- Hitachi High-Technologies Corporation
- Hiroki Kawada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for measuring dimension using electron microscope
- Patent number 7,817,860
- Issue date Oct 19, 2010
- Hitachi High-Technologies Corporation
- Chie Shishido
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND INSPECTION DEVICE
- Publication number 20240297012
- Publication date Sep 5, 2024
- Hitachi High-Tech Corporation
- Atsuko Shintani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN SHAPE EVALUATION DEVICE, PATTERN SHAPE EVALUATION SYSTEM, A...
- Publication number 20220034653
- Publication date Feb 3, 2022
- Hitachi High-Tech Corporation
- Atsuko Shintani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern Measurement Method and Pattern Measurement Device
- Publication number 20190170509
- Publication date Jun 6, 2019
- Hitachi High-Technologies Corporation
- Hiroki KAWADA
- G01 - MEASURING TESTING
Information Patent Application
Pattern Measuring Method and Pattern Measuring Apparatus
- Publication number 20190066973
- Publication date Feb 28, 2019
- Hitachi High-Technologies Corporation
- Hiroki KAWADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Height Measurement Device and Charged Particle Beam Device
- Publication number 20170343340
- Publication date Nov 30, 2017
- Hitachi High-Tecnologies Corporation
- Hiroki KAWADA
- G01 - MEASURING TESTING
Information Patent Application
CONTROL DEVICE, CHARGED PARTICLE BEAM APPARATUS, PROGRAM AND METHOD...
- Publication number 20170278673
- Publication date Sep 28, 2017
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Satoshi Tomimatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern Height Measurement Device and Charged Particle Beam Device
- Publication number 20170211929
- Publication date Jul 27, 2017
- Hitachi High-Technologies Corporation
- Hiroki KAWADA
- G01 - MEASURING TESTING
Information Patent Application
PATTERN MEASUREMENT METHOD AND PATTERN MEASUREMENT DEVICE
- Publication number 20170138725
- Publication date May 18, 2017
- Hitachi High-Technologies Corporation
- Hiroki Kawada
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT DEVICE, CALIBRATION METHOD OF MEASUREMENT DEVICE, AND C...
- Publication number 20170092462
- Publication date Mar 30, 2017
- Hitachi High-Technologies Corporation
- Michio HATANO
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT SYSTEM AND MEASUREMENT METHOD
- Publication number 20170047197
- Publication date Feb 16, 2017
- Hitachi High-Technologies Corporation
- Shoji HOTTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND INSPECTION DEVICE
- Publication number 20170040230
- Publication date Feb 9, 2017
- Hitachi High-Technologies Corporation
- Atsuko Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR LINE PATTERN SHAPE EVALUATION
- Publication number 20160123726
- Publication date May 5, 2016
- Hitachi High-Technologies Corporation
- Atsuko YAMAGUCHI
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT METHOD, IMAGE PROCESSING DEVICE, AND CHARGED PARTICLE B...
- Publication number 20150110406
- Publication date Apr 23, 2015
- Takeyoshi Ohashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR ESTIMATING SHAPE BEFORE SHRINK AND CD-SEM APPARATUS
- Publication number 20150036914
- Publication date Feb 5, 2015
- Hitachi High-Technologies Corporation
- Tomoko Sekiguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASURING METHOD, DATA PROCESSING APPARATUS AND ELECTRON MICROSCOPE...
- Publication number 20140246585
- Publication date Sep 4, 2014
- Hitachi High-Technologies Corporation
- Takeyoshi Ohashi
- G01 - MEASURING TESTING
Information Patent Application
PATTERN DIMENSION MEASUREMENT METHOD AND CHARGED PARTICLE BEAM APPA...
- Publication number 20140048706
- Publication date Feb 20, 2014
- Hitachi High-Technologies Corporation
- Hiroki Kawada
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING DISPLACEMENT BETWEEN PATTERNS AN...
- Publication number 20130264479
- Publication date Oct 10, 2013
- Atsuko YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Image Processing Device, Charged Particle Beam Device, Charged Part...
- Publication number 20130146763
- Publication date Jun 13, 2013
- Hitachi High-Technologies Corporation
- Hiroki Kawada
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR INSPECTION DEVICE AND SEMICONDUCTOR INSPECTION METHOD...
- Publication number 20120098954
- Publication date Apr 26, 2012
- Atsuko Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Tool-To-Tool Matching Control Method And Its System For Scanning El...
- Publication number 20110278453
- Publication date Nov 17, 2011
- Mayuka Oosaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICEL BEAM APPARATUS AND METHODS FOR CAPTURING IMAGES US...
- Publication number 20110133080
- Publication date Jun 9, 2011
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE FORMING METHOD AND CHARGED PARTICLE BEAM APPARATUS
- Publication number 20110032176
- Publication date Feb 10, 2011
- Atsushi Kobaru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample and method for evaluating resolution of scanning electron mi...
- Publication number 20100133426
- Publication date Jun 3, 2010
- Mayuka Oosaki
- G01 - MEASURING TESTING
Information Patent Application
Sample dimension measuring method and scanning electron microscope
- Publication number 20100038535
- Publication date Feb 18, 2010
- Osamu Nasu
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR DATA ANALYSIS
- Publication number 20090263024
- Publication date Oct 22, 2009
- Hitachi High-Technologies Corporation
- Atsuko YAMAGUCHI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING DIMENSION USING ELECTRON MICROSCOPE
- Publication number 20090224152
- Publication date Sep 10, 2009
- Chie Shishido
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Tool-To-Tool Matching Control Method And its System For Scanning El...
- Publication number 20090121134
- Publication date May 14, 2009
- Mayuka Oosaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LENGTH MEASUREMENT SYSTEM
- Publication number 20090046896
- Publication date Feb 19, 2009
- Atsuko YAMAGUCHI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Scanning electron microscope and CD measurement calibration standar...
- Publication number 20080272297
- Publication date Nov 6, 2008
- Hitachi High-Technologies Corporation
- Takeshi Mizuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-ACCURACY PATTERN SHAPE EVALUATING METHOD AND APPARATUS
- Publication number 20080226177
- Publication date Sep 18, 2008
- Atsuko Yamaguchi
- G01 - MEASURING TESTING

Hiroki Kawada

Person

Patents Grantslast 30 patents

Pattern shape evaluation device, pattern shape evaluation system, a...

Pattern measurement method and pattern measurement device

Pattern measuring method and pattern measuring apparatus

Measurement device, calibration method of measurement device, and c...

Pattern height measurement device and charged particle beam device

Pattern measurement method and pattern measurement device

Height measurement device and charged particle beam device

Measurement system and measurement method

Control device, charged particle beam apparatus, program and method...

Method for estimating shape before shrink and CD-SEM apparatus

Charged particle beam device and inspection device

Image processing device, charged particle beam device, charged part...

Method and device for line pattern shape evaluation

Measurement method, image processing device, and charged particle b...

Measuring method, data processing apparatus and electron microscope...

Pattern dimension measurement method and charged particle beam appa...

Semiconductor inspection device and semiconductor inspection method...

Method and apparatus for measuring displacement between patterns an...

Tool-to-tool matching control method and its system for scanning el...

Scanning electron microscope and CD measurement calibration standar...

Length measurement system

Scanning electron microscope and image signal processing method

Apparatus for data analysis

Charged particle beam apparatus and methods for capturing images us...

Image forming method and charged particle beam apparatus

Sample dimension measuring method and scanning electron microscope

Sample and method for evaluating resolution of scanning electron mi...

Tool-to-tool matching control method and its system for scanning el...

Sample dimension measuring method and scanning electron microscope

Method and apparatus for measuring dimension using electron microscope

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM DEVICE AND INSPECTION DEVICE

PATTERN SHAPE EVALUATION DEVICE, PATTERN SHAPE EVALUATION SYSTEM, A...

Pattern Measurement Method and Pattern Measurement Device

Pattern Measuring Method and Pattern Measuring Apparatus

Height Measurement Device and Charged Particle Beam Device

CONTROL DEVICE, CHARGED PARTICLE BEAM APPARATUS, PROGRAM AND METHOD...

Pattern Height Measurement Device and Charged Particle Beam Device

PATTERN MEASUREMENT METHOD AND PATTERN MEASUREMENT DEVICE

MEASUREMENT DEVICE, CALIBRATION METHOD OF MEASUREMENT DEVICE, AND C...

MEASUREMENT SYSTEM AND MEASUREMENT METHOD

CHARGED PARTICLE BEAM DEVICE AND INSPECTION DEVICE

METHOD AND DEVICE FOR LINE PATTERN SHAPE EVALUATION

MEASUREMENT METHOD, IMAGE PROCESSING DEVICE, AND CHARGED PARTICLE B...

METHOD FOR ESTIMATING SHAPE BEFORE SHRINK AND CD-SEM APPARATUS

MEASURING METHOD, DATA PROCESSING APPARATUS AND ELECTRON MICROSCOPE...

PATTERN DIMENSION MEASUREMENT METHOD AND CHARGED PARTICLE BEAM APPA...

METHOD AND APPARATUS FOR MEASURING DISPLACEMENT BETWEEN PATTERNS AN...

Image Processing Device, Charged Particle Beam Device, Charged Part...

SEMICONDUCTOR INSPECTION DEVICE AND SEMICONDUCTOR INSPECTION METHOD...

Tool-To-Tool Matching Control Method And Its System For Scanning El...

CHARGED PARTICEL BEAM APPARATUS AND METHODS FOR CAPTURING IMAGES US...

IMAGE FORMING METHOD AND CHARGED PARTICLE BEAM APPARATUS

Sample and method for evaluating resolution of scanning electron mi...

Sample dimension measuring method and scanning electron microscope

APPARATUS FOR DATA ANALYSIS

METHOD AND APPARATUS FOR MEASURING DIMENSION USING ELECTRON MICROSCOPE

Tool-To-Tool Matching Control Method And its System For Scanning El...

LENGTH MEASUREMENT SYSTEM

Scanning electron microscope and CD measurement calibration standar...

HIGH-ACCURACY PATTERN SHAPE EVALUATING METHOD AND APPARATUS