Hiroki KISHI

Person

Kurokawa-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate support
- Patent number 11,521,886
- Issue date Dec 6, 2022
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning plasma processing apparatus
- Patent number 10,975,468
- Issue date Apr 13, 2021
- Tokyo Electron Limited
- Hiroki Kishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chucking method and substrate processing apparatus
- Patent number 10,825,709
- Issue date Nov 3, 2020
- Tokyo Electron Limited
- Yasuharu Sasaki
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Plasma processing apparatus and focus ring
- Patent number 10,755,902
- Issue date Aug 25, 2020
- Tokyo Electron Limited
- Hiroki Kishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chucking method and substrate processing apparatus
- Patent number 10,269,607
- Issue date Apr 23, 2019
- Tokyo Electron Limited
- Yasuharu Sasaki
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 10,103,011
- Issue date Oct 16, 2018
- Tokyo Electron Limited
- Hiroki Kishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning plasma processing apparatus
- Patent number 10,053,773
- Issue date Aug 21, 2018
- Tokyo Electron Limited
- Hiroki Kishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FOCUS RING AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210316416
- Publication date Oct 14, 2021
- TOKYO ELECTRON LIMITED
- Taketoshi TOMIOKA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE SUPPORT
- Publication number 20210005495
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCKING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190221464
- Publication date Jul 18, 2019
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
METHOD OF CLEANING PLASMA PROCESSING APPARATUS
- Publication number 20180327901
- Publication date Nov 15, 2018
- TOKYO ELECTRON LIMITED
- Hiroki KISHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20170178872
- Publication date Jun 22, 2017
- TOKYO ELECTRON LIMITED
- Hiroki KISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170066103
- Publication date Mar 9, 2017
- TOKYO ELECTRON LIMITED
- Taketoshi TOMIOKA
- B24 - GRINDING POLISHING
Information Patent Application
PLASMA PROCESSING APPARATUS AND FOCUS RING
- Publication number 20160351378
- Publication date Dec 1, 2016
- TOKYO ELECTRON LIMITED
- Hiroki Kishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCKING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160189994
- Publication date Jun 30, 2016
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
METHOD OF CLEANING PLASMA PROCESSING APPARATUS
- Publication number 20150247235
- Publication date Sep 3, 2015
- TOKYO ELECTRON LIMITED
- Hiroki KISHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND FOCUS RING
- Publication number 20150162170
- Publication date Jun 11, 2015
- TOKYO ELECTRON LIMITED
- Hiroki KISHI
- H01 - BASIC ELECTRIC ELEMENTS

Hiroki KISHI

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate support

Method of cleaning plasma processing apparatus

Electrostatic chucking method and substrate processing apparatus

Plasma processing apparatus and focus ring

Electrostatic chucking method and substrate processing apparatus

Plasma processing method and plasma processing apparatus

Method of cleaning plasma processing apparatus

Patents Applicationslast 30 patents

FOCUS RING AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE SUPPORT

ELECTROSTATIC CHUCKING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD OF CLEANING PLASMA PROCESSING APPARATUS

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

FOCUS RING AND SUBSTRATE PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND FOCUS RING

ELECTROSTATIC CHUCKING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD OF CLEANING PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND FOCUS RING