Hiroki Matsumaru

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 8,142,609
- Issue date Mar 27, 2012
- Tokyo Electron Limited
- Syuichi Takahashi
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Plasma processing apparatus, electrode plate for plasma processing...
- Patent number 7,922,862
- Issue date Apr 12, 2011
- Octec Inc.
- Katsuya Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitive coupling plasma processing apparatus
- Patent number 7,767,055
- Issue date Aug 3, 2010
- Tokyo Electron Limited
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, electrode plate for plasma processing...
- Patent number 7,585,386
- Issue date Sep 8, 2009
- Octec Inc.
- Katsuya Okumura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS, ELECTRODE PLATE FOR PLASMA PROCESSING...
- Publication number 20110162802
- Publication date Jul 7, 2011
- Katsuya OKUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, ELECTRODE PLATE FOR PLASMA PROCESSING...
- Publication number 20090285998
- Publication date Nov 19, 2009
- Octec Inc.
- Katsuya Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20080308230
- Publication date Dec 18, 2008
- TOKYO ELECTRON LIMITED
- Syuichi TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20080242086
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Hiroki MATSUMARU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitive coupling plasma processing apparatus
- Publication number 20060118044
- Publication date Jun 8, 2006
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus, electrode plate for plasma processing...
- Publication number 20050276928
- Publication date Dec 15, 2005
- Octec Inc.
- Katsuya Okumura
- H01 - BASIC ELECTRIC ELEMENTS