Hiroki MIURA

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Iwate, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film deposition method and film deposition apparatus
- Patent number 11,702,739
- Issue date Jul 18, 2023
- Tokyo Electron Limited
- Hiroki Miura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS
- Publication number 20190271077
- Publication date Sep 5, 2019
- TOKYO ELECTRON LIMITED
- Hiroki MIURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Etching Method and Method of Filling Recessed Pattern Using the Same
- Publication number 20190157098
- Publication date May 23, 2019
- TOKYO ELECTRON LIMITED
- Takahito UMEHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...