Hiroki MIYAI

Person

KANAGAWA, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Image pickup apparatus and focus adjustment method using bending co...
- Patent number 11,822,233
- Issue date Nov 21, 2023
- Lasertec Corporation
- Hiroki Miyai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Correction method, correction apparatus, and inspection apparatus
- Patent number 10,706,527
- Issue date Jul 7, 2020
- Lasertec Corporation
- Tsunehito Kohyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection apparatus of EUV mask and its focus adjustment method
- Patent number 10,319,088
- Issue date Jun 11, 2019
- Lasertec Corporation
- Hiroki Miyai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Mask inspection apparatus and mask inspection method
- Patent number 10,156,664
- Issue date Dec 18, 2018
- Lasertec Corporation
- Kiwamu Takehisa
- B08 - CLEANING
Information Patent Grant
Inspection apparatus, coordinate detection apparatus, coordinate de...
- Patent number 9,786,057
- Issue date Oct 10, 2017
- Lasertec Coporation
- Hiroki Miyai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Defect coordinates measurement device, defect coordinates measureme...
- Patent number 9,638,739
- Issue date May 2, 2017
- Lasertec Corporation
- Haruhiko Kusunose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
INSPECTION DEVICE AND INSPECTION METHOD
- Publication number 20210247323
- Publication date Aug 12, 2021
- Lasertec Corporation
- Kiwamu TAKEHISA
- G01 - MEASURING TESTING
Information Patent Application
IMAGE PICKUP APPARATUS AND FOCUS ADJUSTMENT METHOD
- Publication number 20210018832
- Publication date Jan 21, 2021
- Lasertec Corporation
- Hiroki MIYAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CORRECTION METHOD, CORRECTION APPARATUS, AND INSPECTION APPARATUS
- Publication number 20180276812
- Publication date Sep 27, 2018
- Lasertec Corporation
- Tsunehito KOHYAMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION APPARATUS AND ITS FOCUS ADJUSTMENT METHOD
- Publication number 20170256045
- Publication date Sep 7, 2017
- Lasertec Corporation
- Hiroki Miyai
- G01 - MEASURING TESTING
Information Patent Application
MASK INSPECTION APPARATUS AND MASK INSPECTION METHOD
- Publication number 20170235031
- Publication date Aug 17, 2017
- Lasertec Corporation
- Kiwamu TAKEHISA
- B08 - CLEANING
Information Patent Application
INSPECTION APPARATUS, COORDINATE DETECTION APPARATUS, COORDINATE DE...
- Publication number 20160088213
- Publication date Mar 24, 2016
- Lasertec Corporation
- Hiroki Miyai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT COORDINATES MEASUREMENT DEVICE, DEFECT COORDINATES MEASUREME...
- Publication number 20130245971
- Publication date Sep 19, 2013
- Lasertec Corporation
- Haruhiko KUSUNOSE
- G01 - MEASURING TESTING
Information Patent Application
PLASMA SHIELD DEVICE AND PLASMA SOURCE APPARATUS
- Publication number 20130234597
- Publication date Sep 12, 2013
- Lasertec Corporation
- Haruhiko KUSUNOSE
- H01 - BASIC ELECTRIC ELEMENTS

Hiroki MIYAI

Person

Patents Grantslast 30 patents

Image pickup apparatus and focus adjustment method using bending co...

Correction method, correction apparatus, and inspection apparatus

Inspection apparatus of EUV mask and its focus adjustment method

Mask inspection apparatus and mask inspection method

Inspection apparatus, coordinate detection apparatus, coordinate de...

Defect coordinates measurement device, defect coordinates measureme...

Patents Applicationslast 30 patents

INSPECTION DEVICE AND INSPECTION METHOD

IMAGE PICKUP APPARATUS AND FOCUS ADJUSTMENT METHOD

CORRECTION METHOD, CORRECTION APPARATUS, AND INSPECTION APPARATUS

INSPECTION APPARATUS AND ITS FOCUS ADJUSTMENT METHOD

MASK INSPECTION APPARATUS AND MASK INSPECTION METHOD

INSPECTION APPARATUS, COORDINATE DETECTION APPARATUS, COORDINATE DE...

DEFECT COORDINATES MEASUREMENT DEVICE, DEFECT COORDINATES MEASUREME...

PLASMA SHIELD DEVICE AND PLASMA SOURCE APPARATUS