Hiroki Murooka

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Saijyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Ion generator and ion implanter
- Patent number 11,107,659
- Issue date Aug 31, 2021
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroki Murooka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Impurity-doped layer formation apparatus and electrostatic chuck pr...
- Patent number 9,312,163
- Issue date Apr 12, 2016
- Sumitomo Heavy Industries, Ltd.
- Masaru Tanaka
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Ion beam processing method and apparatus therefor
- Patent number 6,797,968
- Issue date Sep 28, 2004
- Sumitomo Eaton Nova Corporation
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus capable of increasing beam current
- Patent number 6,794,661
- Issue date Sep 21, 2004
- Sumitomo Eaton Nova Corporation
- Mitsukuni Tsukihara
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
ION GENERATOR AND ION IMPLANTER
- Publication number 20210020403
- Publication date Jan 21, 2021
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroki Murooka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPURITY-DOPED LAYER FORMATION APPARATUS AND ELECTROSTATIC CHUCK PR...
- Publication number 20130019797
- Publication date Jan 24, 2013
- SEN Corporation
- Masaru Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA DOPING APPARATUS AND PLASMA DOPING METHOD
- Publication number 20120015507
- Publication date Jan 19, 2012
- SEN Corporation
- Masaru Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion beam processing method and apparatus therefor
- Publication number 20030122090
- Publication date Jul 3, 2003
- SUMITOMO EATON NOVA CORPORATION
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion implantation apparatus capable of increasing beam current
- Publication number 20020179854
- Publication date Dec 5, 2002
- SUMITOMO EATON NOVA CORPORATION
- Mitsukuni Tsukihara
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING