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Hiroki Oka
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Yamanashi-ken, JP
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last 30 patents
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Patent Grant
Gate valve for semiconductor processing system
Patent number
6,488,262
Issue date
Dec 3, 2002
Tokyo Electron Limited
Hiroki Oka
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Gate valve
Patent number
6,092,786
Issue date
Jul 25, 2000
Tokyo Electron Limited
Hiroki Oka
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...