Hiroki Oozora

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Sputter source, sputtering device, and sputtering method
- Patent number 7,347,919
- Issue date Mar 25, 2008
- Ulvac, Inc.
- Shigemitsu Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SPUTTERING METHOD AND SPUTTERING APPARATUS
- Publication number 20110180394
- Publication date Jul 28, 2011
- Tatsunori Isobe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputter source, sputtering device, and sputtering method
- Publication number 20040231973
- Publication date Nov 25, 2004
- ULVAC, Inc.
- Shigemitsu Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...