Hiroki OTA

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Patents Applicationslast 30 patents

Information Patent Application
POLISHING HEAD, POLISHING DEVICE AND METHOD OF MANUFACTURING SEMICO...
- Publication number 20240198479
- Publication date Jun 20, 2024
- SUMCO CORPORATION
- Hiroki OTA
- B24 - GRINDING POLISHING
Information Patent Application
WAFER POLISHING METHOD AND WAFER POLISHING DEVICE
- Publication number 20230330809
- Publication date Oct 19, 2023
- SUMCO CORPORATION
- Hiroki OTA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD, POLISHING APPARATUS, AND METHOD OF MANUFACTURING SE...
- Publication number 20220161388
- Publication date May 26, 2022
- SUMCO CORPORATION
- Yuki NAKANO
- B24 - GRINDING POLISHING