Hiroki Suzukawa

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Koganei-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,248,584
- Issue date Aug 21, 2012
- Canon Kabushiki Kaisha
- Masataro Shiroiwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and exposure apparatus
- Patent number 6,784,974
- Issue date Aug 31, 2004
- Canon Kabushiki Kaisha
- Hiroki Suzukawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Parameter editing method and semiconductor exposure system
- Patent number 6,499,007
- Issue date Dec 24, 2002
- Canon Kabushiki Kaisha
- Yoichi Kuroki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mark detecting method and apparatus
- Patent number 4,962,423
- Issue date Oct 9, 1990
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of detecting position of a mark
- Patent number 4,933,715
- Issue date Jun 12, 1990
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120274916
- Publication date Nov 1, 2012
- Canon Kabushiki Kaisha
- Masataro Shiroiwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090225292
- Publication date Sep 10, 2009
- Canon Kabushiki Kaisha
- Masataro Shiroiwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus including user interface and method regarding user interface
- Publication number 20040128005
- Publication date Jul 1, 2004
- Canon Kabushiki Kaisha
- Hiroki Suzukawa
- G05 - CONTROLLING REGULATING