Hiroki Tateno

Person

Kawasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Alignment method and apparatus therefor
- Patent number 6,876,946
- Issue date Apr 5, 2005
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method preheating a mask before exposing; a...
- Patent number 6,342,941
- Issue date Jan 29, 2002
- Nikon Corporation
- Masahiro Nei
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method and apparatus therefor
- Patent number 6,278,957
- Issue date Aug 21, 2001
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method and apparatus
- Patent number 5,754,300
- Issue date May 19, 1998
- Nobutaka Magome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring method and exposure apparatus
- Patent number 5,666,205
- Issue date Sep 9, 1997
- Nikon Corporation
- Hiroki Tateno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for aligning processing areas on a substrate with a predeter...
- Patent number 5,596,204
- Issue date Jan 21, 1997
- Nikon Corporation
- Nobuyuki Irie
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning method and apparatus
- Patent number 5,521,036
- Issue date May 28, 1996
- Nikon Corporation
- Yoshichika Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method
- Patent number 5,448,333
- Issue date Sep 5, 1995
- Nikon Corporation
- Yoshichika Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of dimension measurement for a pattern formed by exposure ap...
- Patent number 4,908,656
- Issue date Mar 13, 1990
- Nikon Corporation
- Kyoichi Suwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of and apparatus for detecting the accuracy of superposition...
- Patent number 4,803,524
- Issue date Feb 7, 1989
- Nikon Corporation
- Koichi Ohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Alignment method and apparatus therefor
- Publication number 20030158701
- Publication date Aug 21, 2003
- NIKON CORPORATION
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment method and apparatus therefor
- Publication number 20010049589
- Publication date Dec 6, 2001
- NIKON CORPORATION
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hiroki Tateno

Person

Patents Grantslast 30 patents

Alignment method and apparatus therefor

Exposure apparatus and method preheating a mask before exposing; a...

Alignment method and apparatus therefor

Alignment method and apparatus

Measuring method and exposure apparatus

Method for aligning processing areas on a substrate with a predeter...

Positioning method and apparatus

Exposure method

Method of dimension measurement for a pattern formed by exposure ap...

Method of and apparatus for detecting the accuracy of superposition...

Patents Applicationslast 30 patents

Alignment method and apparatus therefor

Alignment method and apparatus therefor