Hiroki TSUJIKAWA

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Chemical liquid preparation device, and substrate processing device
- Patent number 12,064,739
- Issue date Aug 20, 2024
- SCREEN Holdings Co., Ltd.
- Hajime Nishide
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 11,521,865
- Issue date Dec 6, 2022
- SCREEN Holdings Co., Ltd.
- Hiroki Tsujikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical liquid preparation method, chemical liquid preparation dev...
- Patent number 11,439,967
- Issue date Sep 13, 2022
- SCREEN Holdings Co., Ltd.
- Hajime Nishide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,786,836
- Issue date Sep 29, 2020
- SCREEN Holdings Co., Ltd.
- Atsuyasu Miura
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and processing cup cleaning method
- Patent number 10,658,203
- Issue date May 19, 2020
- SCREEN Holdings Co., Ltd.
- Hiroki Tsujikawa
- B08 - CLEANING
Information Patent Grant
Recovery piping cleaning method and substrate processing apparatus
- Patent number 10,639,683
- Issue date May 5, 2020
- SCREEN Holdings Co., Ltd.
- Yuya Tsuchihashi
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and nozzle cleaning method
- Patent number 10,622,225
- Issue date Apr 14, 2020
- SCREEN Holdings Co., Ltd.
- Atsuyasu Miura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate treatment apparatus and substrate treatment method
- Patent number 10,290,511
- Issue date May 14, 2019
- SCREEN Holdings Co., Ltd.
- Keiji Iwata
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,199,243
- Issue date Feb 5, 2019
- SCREEN Holdings Co., Ltd.
- Kazuhiro Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 7,422,641
- Issue date Sep 9, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Kazuo Nakajima
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 7,314,529
- Issue date Jan 1, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Kazuo Nakajima
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
CHEMICAL LIQUID PREPARATION DEVICE, AND SUBSTRATE PROCESSING DEVICE
- Publication number 20240342672
- Publication date Oct 17, 2024
- SCREEN Holdings Co., Ltd.
- Hajime NISHIDE
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
CHEMICAL LIQUID PREPARATION DEVICE, AND SUBSTRATE PROCESSING DEVICE
- Publication number 20220347641
- Publication date Nov 3, 2022
- SCREEN Holdings Co., Ltd.
- Hajime NISHIDE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20200144081
- Publication date May 7, 2020
- SCREEN Holdings Co., Ltd.
- Hiroki TSUJIKAWA
- B08 - CLEANING
Information Patent Application
CHEMICAL LIQUID PREPARATION METHOD, CHEMICAL LIQUID PREPARATION DEV...
- Publication number 20190091640
- Publication date Mar 28, 2019
- SCREEN Holdings Co., Ltd.
- Hajime NISHIDE
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180158698
- Publication date Jun 7, 2018
- SCREEN Holdings Co., Ltd.
- Kazuhiro Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECOVERY PIPING CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180085795
- Publication date Mar 29, 2018
- SCREEN Holdings Co., Ltd.
- Yuya TSUCHIHASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND NOZZLE CLEANING METHOD
- Publication number 20180061678
- Publication date Mar 1, 2018
- SCREEN Holdings Co., Ltd.
- Atsuyasu MIURA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180029089
- Publication date Feb 1, 2018
- SCREEN Holdings Co., Ltd.
- Atsuyasu MIURA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING CUP CLEANING METHOD
- Publication number 20180025922
- Publication date Jan 25, 2018
- SCREEN Holdings Co., Ltd.
- Hiroki TSUJIKAWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20170162400
- Publication date Jun 8, 2017
- SCREEN Holdings Co., Ltd.
- Keiji IWATA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20140045339
- Publication date Feb 13, 2014
- Keiji IWATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130014787
- Publication date Jan 17, 2013
- Shingo URATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate cleaning apparatus and substrate cleaning method
- Publication number 20050115596
- Publication date Jun 2, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Kazuo Nakajima
- B08 - CLEANING
Information Patent Application
Substrate cleaning apparatus and substrate cleaning method
- Publication number 20030084925
- Publication date May 8, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Kazuo Nakajima
- B08 - CLEANING

Hiroki TSUJIKAWA

Person

Patents Grantslast 30 patents

Chemical liquid preparation device, and substrate processing device

Substrate processing method and substrate processing device

Chemical liquid preparation method, chemical liquid preparation dev...

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and processing cup cleaning method

Recovery piping cleaning method and substrate processing apparatus

Substrate processing apparatus and nozzle cleaning method

Substrate treatment apparatus and substrate treatment method

Substrate processing method and substrate processing apparatus

Substrate cleaning apparatus and substrate cleaning method

Substrate cleaning apparatus and substrate cleaning method

Patents Applicationslast 30 patents

CHEMICAL LIQUID PREPARATION DEVICE, AND SUBSTRATE PROCESSING DEVICE

CHEMICAL LIQUID PREPARATION DEVICE, AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

CHEMICAL LIQUID PREPARATION METHOD, CHEMICAL LIQUID PREPARATION DEV...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

RECOVERY PIPING CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND NOZZLE CLEANING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND PROCESSING CUP CLEANING METHOD

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Substrate cleaning apparatus and substrate cleaning method

Substrate cleaning apparatus and substrate cleaning method