Hiroko SASAKI

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Iwate, JP

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Patents Grantslast 30 patents

Information Patent Grant
Nozzle and substrate processing apparatus using same
- Patent number 10,472,719
- Issue date Nov 12, 2019
- Tokyo Electron Limited
- Yu Wamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of detoxifying exhaust pipe and film forming apparatus
- Patent number 10,053,776
- Issue date Aug 21, 2018
- Tokyo Electron Limited
- Yu Wamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing film
- Patent number 9,748,104
- Issue date Aug 29, 2017
- Tokyo Electron Limited
- Hiroko Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing film
- Patent number 9,136,133
- Issue date Sep 15, 2015
- Tokyo Electron Limited
- Kentaro Oshimo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing a film
- Patent number 8,921,237
- Issue date Dec 30, 2014
- Tokyo Electron Limited
- Kentaro Oshimo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF DETOXIFYING EXHAUST PIPE AND FILM FORMING APPARATUS
- Publication number 20160220953
- Publication date Aug 4, 2016
- TOKYO ELECTRON LIMITED
- Yu Wamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOZZLE AND SUBSTRATE PROCESSING APPARATUS USING SAME
- Publication number 20160138158
- Publication date May 19, 2016
- TOKYO ELECTRON LIMITED
- Yu WAMURA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD OF DEPOSITING FILM
- Publication number 20150031204
- Publication date Jan 29, 2015
- TOKYO ELECTRON LIMITED
- Hiroko SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DEPOSITING FILM
- Publication number 20150011087
- Publication date Jan 8, 2015
- TOKYO ELECTRON LIMITED
- Kentaro OSHIMO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM DEPOSITION APPARATUS
- Publication number 20140209028
- Publication date Jul 31, 2014
- TOKYO ELECTRON LIMITED
- Kentaro OSHIMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING A FILM
- Publication number 20140179104
- Publication date Jun 26, 2014
- TOKYO ELECTRON LIMITED
- Kentaro Oshimo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...