Hiroko TAKEUCHI

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus using focus evaluation values for p...
- Patent number 10,930,468
- Issue date Feb 23, 2021
- HITACHI HIGH-TECH CORPORATION
- Hiroko Takeuchi
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
Charged Beam Apparatus
- Publication number 20190035596
- Publication date Jan 31, 2019
- Hitachi High-Technologies Corporation
- Hiroko TAKEUCHI
- G02 - OPTICS