Hiromi Aoi

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Polishing pad
- Patent number 6,992,123
- Issue date Jan 31, 2006
- JSR Corporation
- Hiroshi Shiho
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Polishing pad and method of polishing a semiconductor wafer
- Publication number 20040224611
- Publication date Nov 11, 2004
- JSR Corporation
- Hiromi Aoi
- B24 - GRINDING POLISHING
Information Patent Application
Polishing pad
- Publication number 20040118051
- Publication date Jun 24, 2004
- JSR Corporation
- Hiroshi Shiho
- B24 - GRINDING POLISHING