Hiromi Hara

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid processing apparatus
- Patent number 11,062,922
- Issue date Jul 13, 2021
- Tokyo Electron Limited
- Takashi Nagai
- G08 - SIGNALLING
Information Patent Grant
Substrate liquid processing apparatus and method, and computer-reda...
- Patent number 11,056,360
- Issue date Jul 6, 2021
- Tokyo Electron Limited
- Hideaki Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,985,035
- Issue date Apr 20, 2021
- Tokyo Electron Limited
- Hiromi Hara
- B08 - CLEANING
Information Patent Grant
Substrate liquid processing apparatus and method, and computer-read...
- Patent number 10,811,266
- Issue date Oct 20, 2020
- Tokyo Electron Limited
- Fumihiro Kamimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,607,849
- Issue date Mar 31, 2020
- Tokyo Electron Limited
- Hideaki Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus and method, and computer-read...
- Patent number 10,460,964
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Hideaki Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 10,032,642
- Issue date Jul 24, 2018
- Tokyo Electron Limited
- Hideaki Sato
- B24 - GRINDING POLISHING
Information Patent Grant
Etching method, etching apparatus, and storage medium
- Patent number 9,887,092
- Issue date Feb 6, 2018
- Tokyo Electron Limited
- Takahiro Furukawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating unit, substrate processing apparatus, and method for heatin...
- Patent number 8,803,039
- Issue date Aug 12, 2014
- Tokyo Electron Limited
- Hideaki Sato
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ultrasonic cleaning apparatus, ultrasonic cleaning method, and stor...
- Patent number 8,777,695
- Issue date Jul 15, 2014
- Tokyo Electron Limited
- Hideaki Sato
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND RECOR...
- Publication number 20230268213
- Publication date Aug 24, 2023
- TOKYO ELECTRON LIMITED
- Takafumi Tsuchiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND METHOD, AND COMPUTER-REDA...
- Publication number 20200013642
- Publication date Jan 9, 2020
- TOKYO ELECTRON LIMITED
- Hideaki SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20180301345
- Publication date Oct 18, 2018
- TOKYO ELECTRON LIMITED
- Hideaki Sato
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20180247841
- Publication date Aug 30, 2018
- TOKYO ELECTRON LIMITED
- Takashi Nagai
- G08 - SIGNALLING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20160336202
- Publication date Nov 17, 2016
- TOKYO ELECTRON LIMITED
- Hideaki Sato
- G02 - OPTICS
Information Patent Application
ETCHING METHOD, ETCHING APPARATUS, AND STORAGE MEDIUM
- Publication number 20160233106
- Publication date Aug 11, 2016
- TOKYO ELECTRON LIMITED
- Takahiro Furukawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND METHOD, AND COMPUTER-READ...
- Publication number 20160184859
- Publication date Jun 30, 2016
- TOKYO ELECTRON LIMITED
- Fumihiro Kamimura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND METHOD, AND COMPUTER-READ...
- Publication number 20160042981
- Publication date Feb 11, 2016
- TOKYO ELECTRON LIMITED
- Hideaki SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20150221530
- Publication date Aug 6, 2015
- TOKYO ELECTRON LIMITED
- Hiromi Hara
- B08 - CLEANING
Information Patent Application
ULTRASONIC CLEANING APPARATUS, ULTRASONIC CLEANING METHOD, AND STOR...
- Publication number 20110056512
- Publication date Mar 10, 2011
- TOKYO ELECTRON LIMITED
- Hideaki SATO
- B08 - CLEANING
Information Patent Application
HEATING UNIT, SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR HEATIN...
- Publication number 20100078423
- Publication date Apr 1, 2010
- TOKYO ELECTRON LIMITED
- Hideaki SATO
- F24 - HEATING RANGES VENTILATING

Hiromi Hara

Person

Patents Grantslast 30 patents

Substrate liquid processing apparatus

Substrate liquid processing apparatus and method, and computer-reda...

Substrate liquid processing apparatus, substrate liquid processing...

Substrate liquid processing apparatus and method, and computer-read...

Substrate liquid processing apparatus, substrate liquid processing...

Substrate liquid processing apparatus and method, and computer-read...

Substrate liquid processing apparatus

Etching method, etching apparatus, and storage medium

Heating unit, substrate processing apparatus, and method for heatin...

Ultrasonic cleaning apparatus, ultrasonic cleaning method, and stor...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND RECOR...

SUBSTRATE LIQUID PROCESSING APPARATUS AND METHOD, AND COMPUTER-REDA...

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

SUBSTRATE LIQUID PROCESSING APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

ETCHING METHOD, ETCHING APPARATUS, AND STORAGE MEDIUM

SUBSTRATE LIQUID PROCESSING APPARATUS AND METHOD, AND COMPUTER-READ...

SUBSTRATE LIQUID PROCESSING APPARATUS AND METHOD, AND COMPUTER-READ...

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

ULTRASONIC CLEANING APPARATUS, ULTRASONIC CLEANING METHOD, AND STOR...

HEATING UNIT, SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR HEATIN...