Hiromi Harada

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Hiratsuka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Magnetron plasma processing apparatus and processing method
- Patent number 5,888,338
- Issue date Mar 30, 1999
- Tokyo Electron Limited
- Hiromi Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetron plasma processing apparatus and processing method
- Patent number 5,660,671
- Issue date Aug 26, 1997
- Tokyo Electron Limited
- Hiromi Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Permanent magnet magnetic circuit and magnetron plasma processing a...
- Patent number 5,387,893
- Issue date Feb 7, 1995
- Tokyo Electron Limited
- Masami Oguriyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetron plasma processing apparatus and processing method
- Patent number 5,376,211
- Issue date Dec 27, 1994
- Tokyo Electron Limited
- Hiromi Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Permanent magnet magnetic circuit
- Patent number 5,289,152
- Issue date Feb 22, 1994
- TDK Corporation
- Masami Oguriyama
- H01 - BASIC ELECTRIC ELEMENTS