Hiromi Itoh

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of forming silicon nitride film and method of manufacturing...
- Patent number 7,510,984
- Issue date Mar 31, 2009
- Ulvac, Inc.
- Tsuyoshi Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SELF-CLEANING CATALYTIC CHEMICAL VAPOR DEPOSITION APPARATUS AND CLE...
- Publication number 20120145184
- Publication date Jun 14, 2012
- Ulvac, Inc.
- Makiko KITAZOE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CATALYTIC CHEMICAL VAPOR DEPOSITION APPARATUS
- Publication number 20090277386
- Publication date Nov 12, 2009
- Ulvac, Inc.
- Makiko Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Self-Cleaning Catalytic Chemical Vapor Deposition Apparatus And Cle...
- Publication number 20070209677
- Publication date Sep 13, 2007
- Makiko Kitazoe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming silicon nitride film and method of manufacturing...
- Publication number 20050196977
- Publication date Sep 8, 2005
- Semiconductor Leading Edge Technologies, Inc.
- Tsuyoshi Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...