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Hiromi Kiyose
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Neyagawa-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate treatment device and substrate treatment method
Patent number
11,508,588
Issue date
Nov 22, 2022
Tokyo Electron Limited
Hiromi Kiyose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method, recording medium and substrate process...
Patent number
11,133,176
Issue date
Sep 28, 2021
Tokyo Electron Limited
Kento Tsukano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of cleaning substrate processing apparatus and system of cle...
Patent number
10,950,465
Issue date
Mar 16, 2021
Tokyo Electron Limited
Shotaro Kitayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
10,619,922
Issue date
Apr 14, 2020
Tokyo Electron Limited
Gentaro Goshi
F26 - DRYING
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
10,504,718
Issue date
Dec 10, 2019
Tokyo Electron Limited
Hiroki Ohno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and re...
Patent number
10,395,950
Issue date
Aug 27, 2019
Tokyo Electron Limited
Gentaro Goshi
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus
Patent number
10,226,959
Issue date
Mar 12, 2019
Kurashiki Boseki Kabushiki Kaisha
Hiromi Kiyose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
10,153,182
Issue date
Dec 11, 2018
Kurashiki Boseki Kabushiki Kaisha
Noboru Higashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate liquid treatment apparatus, method of cleaning substrate...
Patent number
10,037,901
Issue date
Jul 31, 2018
Tokyo Electron Limited
Kazuya Koyama
B08 - CLEANING
Information
Patent Grant
Substrate processing method and substrate processing system
Patent number
9,953,840
Issue date
Apr 24, 2018
Tokyo Electron Limited
Hiroshi Marumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid processing apparatus with cleaning jig
Patent number
9,721,813
Issue date
Aug 1, 2017
Tokyo Electron Limited
Nobuhiro Ogata
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
Substrate Treatment Device and Substrate Treatment Method
Publication number
20200090958
Publication date
Mar 19, 2020
TOKYO ELECTRON LIMITED
Hiromi KIYOSE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, RECORDING MEDIUM AND SUBSTRATE PROCESS...
Publication number
20190051519
Publication date
Feb 14, 2019
TOKYO ELECTRON LIMITED
Kento Tsukano
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20180254180
Publication date
Sep 6, 2018
TOKYO ELECTRON LIMITED
Gentaro Goshi
B08 - CLEANING
Information
Patent Application
METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS AND SYSTEM OF CLE...
Publication number
20180158699
Publication date
Jun 7, 2018
TOKYO ELECTRON LIMITED
Shotaro Kitayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
Publication number
20180138035
Publication date
May 17, 2018
TOKYO ELECTRON LIMITED
Hiroki Ohno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RE...
Publication number
20180130675
Publication date
May 10, 2018
TOKYO ELECTRON LIMITED
Gentaro Goshi
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
Publication number
20180096863
Publication date
Apr 5, 2018
TOKYO ELECTRON LIMITED
Gentaro GOSHI
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
Publication number
20170254589
Publication date
Sep 7, 2017
TOKYO ELECTRON LIMITED
Gentaro Goshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
Publication number
20170186620
Publication date
Jun 29, 2017
TOKYO ELECTRON LIMITED
Hiroshi Marumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE LIQUID TREATMENT APPARATUS, METHOD OF CLEANING SUBSTRATE...
Publication number
20150328668
Publication date
Nov 19, 2015
TOKYO ELECTRON LIMITED
Kazuya KOYAMA
B08 - CLEANING
Information
Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
Publication number
20140373877
Publication date
Dec 25, 2014
Shigehisa Inoue
B08 - CLEANING
Information
Patent Application
LIQUID PROCESSING APPARATUS, CLEANING JIG, AND CLEANING METHOD
Publication number
20140014134
Publication date
Jan 16, 2014
Nobuhiro Ogata
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20130240143
Publication date
Sep 19, 2013
CHEMICAL ART TECHNOLOGY, INC.
Hiromi Kiyose
B44 - DECORATIVE ARTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20130048215
Publication date
Feb 28, 2013
TOKYO ELECTRON LIMITED
Noboru Higashi
G01 - MEASURING TESTING