Hiromi Kiyose

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Hillsboro, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,322,371
- Issue date May 3, 2022
- Tokyo Electron Limited
- Hiromi Kiyose
- B08 - CLEANING
Information Patent Grant
Substrate processing method, recording medium and substrate process...
- Patent number 11,201,050
- Issue date Dec 14, 2021
- Tokyo Electron Limited
- Itaru Kanno
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD, RECORDING MEDIUM AND SUBSTRATE PROCESS...
- Publication number 20190355574
- Publication date Nov 21, 2019
- TOKYO ELECTRON LIMITED
- Itaru Kanno
- F26 - DRYING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20190139791
- Publication date May 9, 2019
- TOKYO ELECTRON LIMITED
- Hiromi Kiyose
- B08 - CLEANING