Hiromi Kumagai

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Multiple-shaft power transmission apparatus and wafer transport arm...
- Patent number 6,247,889
- Issue date Jun 19, 2001
- BKS Lab. Ltd.
- Hiroko Kono
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method and apparatus for generating a low pressure plasma
- Patent number 5,916,455
- Issue date Jun 29, 1999
- Applied Materials, Inc.
- Hiromi Kumagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetron plasma processing apparatus and processing method
- Patent number 5,888,338
- Issue date Mar 30, 1999
- Tokyo Electron Limited
- Hiromi Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetron plasma processing apparatus and processing method
- Patent number 5,660,671
- Issue date Aug 26, 1997
- Tokyo Electron Limited
- Hiromi Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus with a spare vacuum chamber
- Patent number 5,439,547
- Issue date Aug 8, 1995
- Tokyo Electron Kabushiki Kaisha
- Hiromi Kumagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetron plasma processing apparatus and processing method
- Patent number 5,376,211
- Issue date Dec 27, 1994
- Tokyo Electron Limited
- Hiromi Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface processing apparatus
- Patent number 5,332,442
- Issue date Jul 26, 1994
- Tokyo Electron Kabushiki Kaisha
- Masao Kubodera
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heating furnace for semiconductor wafers
- Patent number 4,954,685
- Issue date Sep 4, 1990
- Tokyo Electron Limited
- Hiromi Kumagai
- C30 - CRYSTAL GROWTH
Information Patent Grant
Wafer feeding apparatus
- Patent number 4,733,632
- Issue date Mar 29, 1988
- Tokyo Electron Limited
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Multiple-shaft power transmission apparatus and wafer transport arm...
- Publication number 20010012483
- Publication date Aug 9, 2001
- BKS Lab. Ltd.
- Hiroko Kono
- H01 - BASIC ELECTRIC ELEMENTS

Hiromi Kumagai

Person

Patents Grantslast 30 patents

Multiple-shaft power transmission apparatus and wafer transport arm...

Method and apparatus for generating a low pressure plasma

Magnetron plasma processing apparatus and processing method

Magnetron plasma processing apparatus and processing method

Semiconductor manufacturing apparatus with a spare vacuum chamber

Magnetron plasma processing apparatus and processing method

Surface processing apparatus

Heating furnace for semiconductor wafers

Wafer feeding apparatus

Patents Applicationslast 30 patents

Multiple-shaft power transmission apparatus and wafer transport arm...