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Hiromi Nagahama
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Shibata-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Silicon wafer cleaning method
Patent number
7,226,513
Issue date
Jun 5, 2007
Toshiba Ceramics Co., Ltd.
Hisatsugu Kurita
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Patents Applications
last 30 patents
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Patent Application
Silicon wafer cleaning method
Publication number
20040045580
Publication date
Mar 11, 2004
TOSHIBA CERAMICS CO.,LTD.
Hisatsugu Kurita
B08 - CLEANING