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Hiromi Ohtsuka
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Tosu-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Cleaning and drying apparatus for substrate holder chuck and method...
Patent number
7,578,304
Issue date
Aug 25, 2009
Tokyo Electron Limited
Hiromi Ohtsuka
B08 - CLEANING
Information
Patent Grant
Substrate holder, and system and method for cleaning and drying same
Patent number
6,158,596
Issue date
Dec 12, 2000
Tokyo Electron Limited
Hiromi Ohtsuka
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Cleaning and drying apparatus for substrate holder chuck and method...
Publication number
20050039779
Publication date
Feb 24, 2005
TOKYO ELECTRON LIMITED
Hiromi Ohtsuka
B08 - CLEANING