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Hiromi Oka

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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma etching method
    • Patent number 7,432,172
    • Issue date Oct 7, 2008
    • Tokyo Electron Limited
    • Akitaka Shimizu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dry etching method
    • Patent number 7,179,752
    • Issue date Feb 20, 2007
    • Tokyo Electron Limited
    • Akitaka Shimizu
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20070187363
    • Publication date Aug 16, 2007
    • TOKYO ELECTRON LIMITED
    • Hiromi OKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma etching method
    • Publication number 20060163202
    • Publication date Jul 27, 2006
    • TOKYO ELECTRON LIMITED
    • Akitaka Shimizu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Dry etching method
    • Publication number 20040214445
    • Publication date Oct 28, 2004
    • Akitaka Shimizu
    • H01 - BASIC ELECTRIC ELEMENTS