TREA

Hiromi Sakima

Follow

Person

  • Nirasaki-shi, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing method and apparatus
    • Patent number 7,481,230
    • Issue date Jan 27, 2009
    • Tokyo Electron Limited
    • Hiromi Sakima
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma etching apparatus
    • Patent number 5,556,500
    • Issue date Sep 17, 1996
    • Tokyo Electron Limited
    • Makoto Hasegawa
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents