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Hiromi Sakima
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Richardson, TX, US
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Patents Grants
last 30 patents
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Patent Grant
Defect and etch rate control in trench etch for dual damascene patt...
Patent number
6,455,411
Issue date
Sep 24, 2002
Texas Instruments Incorporated
Ping Jiang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Defect and etch rate control in trench etch for dual damascene patt...
Publication number
20020031906
Publication date
Mar 14, 2002
Ping Jiang
H01 - BASIC ELECTRIC ELEMENTS