Hiromi SHIMA

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Vertical heat treatment apparatus
- Patent number 10,968,515
- Issue date Apr 6, 2021
- Tokyo Electron Limited
- Eiji Kikama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming blocking silicon oxide film, and storage medium
- Patent number 10,964,530
- Issue date Mar 30, 2021
- Tokyo Electron Limited
- Kyungseok Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film-forming method and film-forming apparatus
- Patent number 10,781,515
- Issue date Sep 22, 2020
- Tokyo Electron Limited
- Kyungseok Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming silicon oxide film, and storage me...
- Patent number 10,553,686
- Issue date Feb 4, 2020
- TOKYO ELECTRONC LIMITED
- Kyungseok Ko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of controlling gas supply apparatus and substrate processing...
- Patent number 9,758,867
- Issue date Sep 12, 2017
- Tokyo Electron Limited
- Shigeru Nakajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, film forming apparatus, and storage medium
- Patent number 9,640,448
- Issue date May 2, 2017
- Tokyo Electron Limited
- Hiroaki Ikegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment method
- Patent number 9,422,624
- Issue date Aug 23, 2016
- Tokyo Electron Limited
- Shigeru Nakajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Film-Forming Method and Film-Forming Apparatus
- Publication number 20190271074
- Publication date Sep 5, 2019
- TOKYO ELECTRON LIMITED
- Kyungseok KO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vertical Heat Treatment Apparatus
- Publication number 20190186014
- Publication date Jun 20, 2019
- TOKYO ELECTRON LIMITED
- Eiji Kikama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM
- Publication number 20190131126
- Publication date May 2, 2019
- TOKYO ELECTRON LIMITED
- Kyungseok KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Forming Silicon Oxide Film, and Storage Me...
- Publication number 20190080913
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Kyungseok KO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas Injector and Vertical Heat Treatment Apparatus
- Publication number 20180135179
- Publication date May 17, 2018
- TOKYO ELECTRON LIMITED
- Toshiyuki IKEUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Forming Method, Film Forming Apparatus, and Storage Medium
- Publication number 20160284613
- Publication date Sep 29, 2016
- TOKYO ELECTRON LIMITED
- Hiroaki IKEGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Forming Titanium Carbonitride Film and Film Formation App...
- Publication number 20150259792
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Shigeru NAKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY METHOD AND THERMAL TREATMENT METHOD
- Publication number 20150221529
- Publication date Aug 6, 2015
- TOKYO ELECTRON LIMITED
- Haruhiko FURUYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD AND STORAG...
- Publication number 20150211113
- Publication date Jul 30, 2015
- TOKYO ELECTRON LIMITED
- Shigeru NAKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CONTROLLING GAS SUPPLY APPARATUS AND SUBSTRATE PROCESSING...
- Publication number 20140290577
- Publication date Oct 2, 2014
- TOKYO ELECTRON LIMITED
- Shigeru NAKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY APPARATUS AND HEAT TREATMENT APPARATUS
- Publication number 20130205611
- Publication date Aug 15, 2013
- TOKYO ELECTRON LIMITED
- Yu WAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY APPARATUS, THERMAL TREATMENT APPARATUS, GAS SUPPLY METHO...
- Publication number 20120288625
- Publication date Nov 15, 2012
- TOKYO ELECTRON LIMITED
- Haruhiko FURUYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hiromi SHIMA

Person

Patents Grantslast 30 patents

Vertical heat treatment apparatus

Method of forming blocking silicon oxide film, and storage medium

Film-forming method and film-forming apparatus

Method and apparatus for forming silicon oxide film, and storage me...

Method of controlling gas supply apparatus and substrate processing...

Film forming method, film forming apparatus, and storage medium

Heat treatment method

Patents Applicationslast 30 patents

Film-Forming Method and Film-Forming Apparatus

Vertical Heat Treatment Apparatus

METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM

Method and Apparatus for Forming Silicon Oxide Film, and Storage Me...

Gas Injector and Vertical Heat Treatment Apparatus

Film Forming Method, Film Forming Apparatus, and Storage Medium

Method of Forming Titanium Carbonitride Film and Film Formation App...

GAS SUPPLY METHOD AND THERMAL TREATMENT METHOD

VERTICAL HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD AND STORAG...

METHOD OF CONTROLLING GAS SUPPLY APPARATUS AND SUBSTRATE PROCESSING...

GAS SUPPLY APPARATUS AND HEAT TREATMENT APPARATUS

GAS SUPPLY APPARATUS, THERMAL TREATMENT APPARATUS, GAS SUPPLY METHO...