Hiromi Suda

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Illumination optical system, exposure apparatus, and method of manu...
- Patent number 9,946,056
- Issue date Apr 17, 2018
- Canon Kabushiki Kaisha
- Hiromi Suda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical device, exposure apparatus, and method of manu...
- Patent number 9,733,571
- Issue date Aug 15, 2017
- Canon Kabushiki Kaisha
- Hiromi Suda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Focusing method, focusing apparatus, exposure method, and device ma...
- Patent number 9,557,523
- Issue date Jan 31, 2017
- Canon Kabushiki Kaisha
- Hiromi Suda
- G02 - OPTICS
Information Patent Grant
Illumination optical apparatus, relay optical system, exposure appa...
- Patent number 8,436,980
- Issue date May 7, 2013
- Canon Kabushiki Kaisha
- Hiromi Suda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and correction apparatus
- Patent number 8,149,380
- Issue date Apr 3, 2012
- Canon Kabushiki Kaisha
- Hiromi Suda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 7,489,387
- Issue date Feb 10, 2009
- Canon Kabushiki Kaisha
- Hiromi Suda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND METHOD OF MAN...
- Publication number 20160266497
- Publication date Sep 15, 2016
- Canon Kabushiki Kaisha
- Hiromi Suda
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL DEVICE, EXPOSURE APPARATUS, AND METHOD OF MA...
- Publication number 20160085158
- Publication date Mar 24, 2016
- Canon Kabushiki Kaisha
- Hiromi Suda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FOCUSING METHOD, FOCUSING APPARATUS, EXPOSURE METHOD, AND DEVICE M...
- Publication number 20140354968
- Publication date Dec 4, 2014
- Canon Kabushiki Kaisha
- Hiromi Suda
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS AND CORRECTION APPARATUS
- Publication number 20090097005
- Publication date Apr 16, 2009
- Canon Kabushiki Kaisha
- Hiromi Suda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL APPARATUS, RELAY OPTICAL SYSTEM, EXPOSURE APPA...
- Publication number 20080259450
- Publication date Oct 23, 2008
- Canon Kabushiki Kaisha
- Hiromi Suda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20080129975
- Publication date Jun 5, 2008
- Canon Kabushiki Kaisha
- Hiromi Suda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20070211231
- Publication date Sep 13, 2007
- Hiromi SUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hiromi Suda

Person

Patents Grantslast 30 patents

Illumination optical system, exposure apparatus, and method of manu...

Illumination optical device, exposure apparatus, and method of manu...

Focusing method, focusing apparatus, exposure method, and device ma...

Illumination optical apparatus, relay optical system, exposure appa...

Exposure apparatus and correction apparatus

Exposure apparatus and device fabrication method

Patents Applicationslast 30 patents

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND METHOD OF MAN...

ILLUMINATION OPTICAL DEVICE, EXPOSURE APPARATUS, AND METHOD OF MA...

FOCUSING METHOD, FOCUSING APPARATUS, EXPOSURE METHOD, AND DEVICE M...

EXPOSURE APPARATUS AND CORRECTION APPARATUS

ILLUMINATION OPTICAL APPARATUS, RELAY OPTICAL SYSTEM, EXPOSURE APPA...

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD